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John M. de Larios
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Palo Alto, CA, US
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last 30 patents
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Patent Application
Apparatus for Cleaning Contaminants from Substrate
Publication number
20100313918
Publication date
Dec 16, 2010
LAM RESEARCH CORPORATION
Mikhail Korolik
B08 - CLEANING
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Patent Application
SUBSTRATE PROXIMITY DRYING USING IN-SITU LOCAL HEATING OF SUBSTRATE
Publication number
20100313443
Publication date
Dec 16, 2010
Katrina Mikhaylichenko
B08 - CLEANING
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Patent Application
Cleaning Compound and Method and System for Using the Cleaning Comp...
Publication number
20100139694
Publication date
Jun 10, 2010
Erik M. Freer
B08 - CLEANING
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Patent Application
CONTROLS OF AMBIENT ENVIRONMENT DURING WAFER DRYING USING PROXIMITY...
Publication number
20090320884
Publication date
Dec 31, 2009
Mikhail Korolik
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR