John M. de Larios

Person

Santa Clara, CA, US

People

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR PROCESSING A SUBSTRATE USING A SINGLE PHASE PROXIMITY HE...
- Publication number 20110265823
- Publication date Nov 3, 2011
- Mike Ravkin
- B08 - CLEANING
Information Patent Application
Reduction of Entrance and Exit Marks Left by a Substrate-Processing...
- Publication number 20100170539
- Publication date Jul 8, 2010
- LAM RESEARCH CORPORATION
- Robert O'Donnell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENHANCED WAFER CLEANING METHOD
- Publication number 20080169008
- Publication date Jul 17, 2008
- Seokmin Yun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and method for confined area planarization
- Publication number 20070227656
- Publication date Oct 4, 2007
- LAM RESEARCH CORPORATION
- John M. Boyd
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Non-contact discrete removal of substrate surface contaminants/coat...
- Publication number 20060131268
- Publication date Jun 22, 2006
- Lam Research Corp.
- Katrina Mikhaylichenko
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
System and method for modulating flow through multiple ports in a p...
- Publication number 20060064895
- Publication date Mar 30, 2006
- LAM RESEARCH CORPORATION
- James P. Garcia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for cleaning semiconductor wafers using compre...
- Publication number 20050133060
- Publication date Jun 23, 2005
- John M. de Larios
- B08 - CLEANING
Information Patent Application
Method and apparatus for cooling a resonator of a megasonic transducer
- Publication number 20040173238
- Publication date Sep 9, 2004
- LAM RESEARCH CORPORATION
- John M. Boyd
- B08 - CLEANING
Information Patent Application
Method and apparatus for cleaning a substrate using megasonic power
- Publication number 20040069319
- Publication date Apr 15, 2004
- Lam Research Corp.
- John M. Boyd
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Vertical proximity processor
- Publication number 20040060581
- Publication date Apr 1, 2004
- Lam Research Corp.
- James P. Garcia
- B08 - CLEANING

John M. de Larios

Person

Patents Applicationslast 30 patents

METHOD FOR PROCESSING A SUBSTRATE USING A SINGLE PHASE PROXIMITY HE...

Reduction of Entrance and Exit Marks Left by a Substrate-Processing...

ENHANCED WAFER CLEANING METHOD

Apparatus and method for confined area planarization

Non-contact discrete removal of substrate surface contaminants/coat...

System and method for modulating flow through multiple ports in a p...

Method and apparatus for cleaning semiconductor wafers using compre...

Method and apparatus for cooling a resonator of a megasonic transducer

Method and apparatus for cleaning a substrate using megasonic power

Vertical proximity processor