John MacNeil

Person

Vale of Glamorgan, GB

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for electrochemically processing semiconductor substrates
- Patent number 11,643,744
- Issue date May 9, 2023
- SPTS Technologies Limited
- John Macneil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for processing a substrate
- Patent number 11,236,433
- Issue date Feb 1, 2022
- SPTS Technologies Limited
- Martin Ayres
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Apparatus for electrochemically processing semiconductor substrates
- Patent number 11,066,754
- Issue date Jul 20, 2021
- SPTS Technologies Limited
- John Macneil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrochemical deposition chamber
- Patent number 10,385,471
- Issue date Aug 20, 2019
- SPTS Technologies Limited
- John MacNeil
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Electro chemical deposition apparatus
- Patent number 9,945,043
- Issue date Apr 17, 2018
- SPTS Technologies Limited
- John Macneil
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Electrochemical deposition chamber
- Patent number 9,903,039
- Issue date Feb 27, 2018
- SPTS Technologies Limited
- John MacNeil
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Ion beam source
- Patent number 8,968,535
- Issue date Mar 3, 2015
- SPP Process Technology Systems UK Limited
- John MacNeil
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Positive displacement pumping chamber
- Patent number 8,728,337
- Issue date May 20, 2014
- SPTS Technologies Limited
- Carl Brancher
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming amorphous TiN by thermal chemical vapor depositio...
- Patent number 7,732,307
- Issue date Jun 8, 2010
- Aviza Technology Limited
- Stephen Robert Burgess
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming a substantially closed void
- Patent number 7,351,669
- Issue date Apr 1, 2008
- Aviza Technology Limited
- John MacNeil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for forming a film on a substrate
- Patent number 7,309,662
- Issue date Dec 18, 2007
- Aviza Europe Limited
- Katherine Giles
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for forming precursors
- Patent number 7,279,201
- Issue date Oct 9, 2007
- Aviza Europe Limited
- John Macneil
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Forming low k dielectric layers
- Patent number 7,205,246
- Issue date Apr 17, 2007
- Aviza Technology Limited
- John MacNeil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dielectric layer for a semiconductor device and method of producing...
- Patent number 6,846,757
- Issue date Jan 25, 2005
- Trikon Holdings Limited
- John MacNeil
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dielectric layer for a semiconductor device and method of producing...
- Patent number 6,653,247
- Issue date Nov 25, 2003
- Trikon Holdings Limited
- John MacNeil
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Delivery of liquid precursors to semiconductor processing reactors
- Patent number 6,640,840
- Issue date Nov 4, 2003
- Trikon Holdings Limited
- John MacNeil
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for forming a film on a substrate
- Patent number 6,627,535
- Issue date Sep 30, 2003
- Trikon Holdings Ltd.
- John MacNeil
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR ELECTROCHEMICALLY PROCESSING SEMICONDUCTOR SUBSTRATES
- Publication number 20210317592
- Publication date Oct 14, 2021
- SPTS TECHNOLOGIES LIMITED
- JOHN MACNEIL
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Apparatus and Method for Processing a Substrate
- Publication number 20200325588
- Publication date Oct 15, 2020
- SPTS TECHNOLOGIES LIMITED
- Martin Ayres
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD OF PRODUCING A STRUCTURE
- Publication number 20190382908
- Publication date Dec 19, 2019
- PICOFLUIDICS LIMITED
- John Macneil
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
APPARATUS FOR ELECTROCHEMICALLY PROCESSING SEMICONDUCTOR SUBSTRATES
- Publication number 20180211856
- Publication date Jul 26, 2018
- SPTS TECHNOLOGIES LIMITED
- JOHN MACNEIL
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
ELECTROCHEMICAL DEPOSITION CHAMBER
- Publication number 20180171503
- Publication date Jun 21, 2018
- SPTS TECHNOLOGIES LIMITED
- John MACNEIL
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
ELECTROCHEMICAL DEPOSITION CHAMBER
- Publication number 20140284216
- Publication date Sep 25, 2014
- PICOFLUIDICS LIMITED
- John MACNEIL
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
ELECTRO CHEMICAL DEPOSITION APPARATUS
- Publication number 20130313124
- Publication date Nov 28, 2013
- PICO-FLUIDICS LIMITED
- John Macneil
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
POSITIVE DISPLACEMENT PUMPING CHAMBER
- Publication number 20130186857
- Publication date Jul 25, 2013
- SPTS TECHNOLOGIES LIMITED
- CARL DAVID M. BRANCHER
- B44 - DECORATIVE ARTS
Information Patent Application
GAS DELIVERY DEVICE
- Publication number 20110268891
- Publication date Nov 3, 2011
- SPP PROCESS TECHNOLOGY SYSTEMS UK LIMITED
- John MacNeil
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION BEAM SOURCE
- Publication number 20110139605
- Publication date Jun 16, 2011
- SPP PROCESS TECHNOLOGY SYSTEMS UK LIMITED
- John MACNEIL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20090104774
- Publication date Apr 23, 2009
- NXP B.V.
- Yukiko Furukawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Positive Displacement Pumping Chamber
- Publication number 20080245770
- Publication date Oct 9, 2008
- AVIZA TECHNOLOGY LIMITED
- Carl David M. Brancher
- B44 - DECORATIVE ARTS
Information Patent Application
Amorphus TiN
- Publication number 20050275101
- Publication date Dec 15, 2005
- Stephen Robert Burgess
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and apparatus for forming precursors
- Publication number 20040149220
- Publication date Aug 5, 2004
- John Macneil
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of filling a via or recess in a semiconductor substrate
- Publication number 20040115923
- Publication date Jun 17, 2004
- John Macneil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and apparatus for forming a film on a substrate
- Publication number 20040056356
- Publication date Mar 25, 2004
- John MacNeil
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Dielectric layer for a semiconductor device and method of producing...
- Publication number 20040053459
- Publication date Mar 18, 2004
- John MacNeil
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Delivery of liquid precursors to semiconductor processing reactors
- Publication number 20040040505
- Publication date Mar 4, 2004
- John MacNeil
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of filling trenches
- Publication number 20030157781
- Publication date Aug 21, 2003
- John Macneil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Forming low k dielectric layers
- Publication number 20030124870
- Publication date Jul 3, 2003
- John Macneil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dielectric layer for a semiconductor device and method of producing...
- Publication number 20020055275
- Publication date May 9, 2002
- John MacNeil
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and apparatus for forming a film on s substrate
- Publication number 20010030369
- Publication date Oct 18, 2001
- John MacNeil
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

John MacNeil

Person

Patents Grantslast 30 patents

Apparatus for electrochemically processing semiconductor substrates

Apparatus and method for processing a substrate

Apparatus for electrochemically processing semiconductor substrates

Electrochemical deposition chamber

Electro chemical deposition apparatus

Electrochemical deposition chamber

Ion beam source

Positive displacement pumping chamber

Method of forming amorphous TiN by thermal chemical vapor depositio...

Method of forming a substantially closed void

Method and apparatus for forming a film on a substrate

Methods and apparatus for forming precursors

Forming low k dielectric layers

Dielectric layer for a semiconductor device and method of producing...

Dielectric layer for a semiconductor device and method of producing...

Delivery of liquid precursors to semiconductor processing reactors

Methods and apparatus for forming a film on a substrate

Patents Applicationslast 30 patents

APPARATUS FOR ELECTROCHEMICALLY PROCESSING SEMICONDUCTOR SUBSTRATES

Apparatus and Method for Processing a Substrate

METHOD OF PRODUCING A STRUCTURE

APPARATUS FOR ELECTROCHEMICALLY PROCESSING SEMICONDUCTOR SUBSTRATES

ELECTROCHEMICAL DEPOSITION CHAMBER

ELECTROCHEMICAL DEPOSITION CHAMBER

ELECTRO CHEMICAL DEPOSITION APPARATUS

POSITIVE DISPLACEMENT PUMPING CHAMBER

GAS DELIVERY DEVICE

ION BEAM SOURCE

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

Positive Displacement Pumping Chamber

Amorphus TiN

Methods and apparatus for forming precursors

Method of filling a via or recess in a semiconductor substrate

Methods and apparatus for forming a film on a substrate

Dielectric layer for a semiconductor device and method of producing...

Delivery of liquid precursors to semiconductor processing reactors

Method of filling trenches

Forming low k dielectric layers

Dielectric layer for a semiconductor device and method of producing...

Methods and apparatus for forming a film on s substrate