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John Michael Kerns
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Livermore, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Coating system and method for coating interior fluid wetted surface...
Patent number
9,873,940
Issue date
Jan 23, 2018
Lam Research Corporation
Lin Xu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Dense oxide coated component of a plasma processing chamber and met...
Patent number
9,546,432
Issue date
Jan 17, 2017
Lam Research Corporation
Hong Shih
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Corrosion resistant aluminum coating on plasma chamber components
Patent number
9,337,002
Issue date
May 10, 2016
Lam Research Corporation
John Daugherty
C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information
Patent Grant
Dense oxide coated component of a plasma processing chamber and met...
Patent number
9,123,651
Issue date
Sep 1, 2015
Lam Research Corporation
Hong Shih
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
CERAMIC COMPONENT WITH CHANNELS
Publication number
20230411124
Publication date
Dec 21, 2023
LAM RESEARCH CORPORATION
John Michael KERNS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
YTTRIUM ALUMINUM COATING FOR PLASMA PROCESSING CHAMBER COMPONENTS
Publication number
20230088848
Publication date
Mar 23, 2023
LAM RESEARCH CORPORATION
Lin XU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LOW TEMPERATURE SINTERED COATINGS FOR PLASMA CHAMBERS
Publication number
20230020387
Publication date
Jan 19, 2023
LAM RESEARCH CORPORATION
David Joseph WETZEL
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SINGLE CRYSTAL METAL OXIDE PLASMA CHAMBER COMPONENT
Publication number
20220392753
Publication date
Dec 8, 2022
Lin XU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR MEASURING PARTICLES
Publication number
20210341377
Publication date
Nov 4, 2021
LAM RESEARCH CORPORATION
Amir A. YASSERI
G01 - MEASURING TESTING
Information
Patent Application
COATING SYSTEM AND METHOD FOR COATING INTERIOR FLUID WETTED SURFACE...
Publication number
20180127868
Publication date
May 10, 2018
LAM RESEARCH CORPORATION
Lin XU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Systems Comprising Silicon Coated Gas Supply Conduits and Methods f...
Publication number
20170040147
Publication date
Feb 9, 2017
LAM RESEARCH CORPORATION
Hong Shih
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
USE OF PLASMA-RESISTANT ATOMIC LAYER DEPOSITION COATINGS TO EXTEND...
Publication number
20160379806
Publication date
Dec 29, 2016
LAM RESEARCH CORPORATION
Lin XU
B32 - LAYERED PRODUCTS
Information
Patent Application
DENSE OXIDE COATED COMPONENT OF A PLASMA PROCESSING CHAMBER AND MET...
Publication number
20150337450
Publication date
Nov 26, 2015
LAM RESEARCH CORPORATION
Hong SHIH
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
COMPONENT OF A PLASMA PROCESSING APPARATUS INCLUDING AN ELECTRICALL...
Publication number
20150187615
Publication date
Jul 2, 2015
LAM RESEARCH CORPORATION
John Daugherty
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
COATING SYSTEM AND METHOD FOR COATING INTERIOR FLUID WETTED SURFACE...
Publication number
20150184296
Publication date
Jul 2, 2015
Lam Research Corporation
Lin Xu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
COLD SPRAY BARRIER COATED COMPONENT OF A PLASMA PROCESSING CHAMBER...
Publication number
20140315392
Publication date
Oct 23, 2014
LAM RESEARCH CORPORATION
Lin Xu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DENSE OXIDE COATED COMPONENT OF A PLASMA PROCESSING CHAMBER AND MET...
Publication number
20140295670
Publication date
Oct 2, 2014
LAM RESEARCH CORPORATION
Hong Shih
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
CORROSION RESISTANT ALUMINUM COATING ON PLASMA CHAMBER COMPONENTS
Publication number
20140272459
Publication date
Sep 18, 2014
LAM RESEARCH CORPORATION
John Daugherty
C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information
Patent Application
TUNGSTEN CARBIDE COATED METAL COMPONENT OF A PLASMA REACTOR CHAMBER...
Publication number
20140113453
Publication date
Apr 24, 2014
LAM RESEARCH CORPORATION
Hong Shih
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Systems Comprising Silicon Coated Gas Supply Conduits And Methods F...
Publication number
20130105083
Publication date
May 2, 2013
LAM RESEARCH CORPORATION
Hong Shih
H01 - BASIC ELECTRIC ELEMENTS