TREA

John Pegg

Follow

Person

  • Englewood, OH, US
People

Patents Grantslast 30 patents

  • Information Patent Grant

    Showerhead electrodes
    • Patent number 8,268,117
    • Issue date Sep 18, 2012
    • Lam Research Corporation
    • Greg Bettencourt
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Showerhead electrode assemblies and plasma processing chambers inco...
    • Patent number 8,152,954
    • Issue date Apr 10, 2012
    • Lam Research Corporation
    • Greg Bettencourt
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    SHOWERHEAD ELECTRODES
    • Publication number 20120160941
    • Publication date Jun 28, 2012
    • LAM RESEARCH CORPORATION
    • Greg Bettencourt
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SHOWERHEAD ELECTRODE ASSEMBLIES AND PLASMA PROCESSING CHAMBERS INCO...
    • Publication number 20090095424
    • Publication date Apr 16, 2009
    • LAM RESEARCH CORPORATION
    • Greg Bettencourt
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...