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John-Pierre Rey
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Fontenay Aux Roses, FR
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last 30 patents
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Patent Grant
Focused beam spectroscopic ellipsometry method and system
Patent number
6,734,967
Issue date
May 11, 2004
KLA-Tencor Technologies Corporation
Timothy R. Piwonka-Corle
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
Focused beam spectroscopic ellipsometry method and system
Publication number
20050105090
Publication date
May 19, 2005
Timothy R. Piwonka-Corle
G01 - MEASURING TESTING