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John R. Doughty
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Poughkeepsie, NY, US
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last 30 patents
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Patent Grant
Wafer slip detection during CMP processing
Patent number
9,240,042
Issue date
Jan 19, 2016
GLOBALFOUNDRIES Inc.
John R. Doughty
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
WAFER SLIP DETECTION DURING CMP PROCESSING
Publication number
20160082566
Publication date
Mar 24, 2016
GLOBALFOUNDRIES INC.
John R. Doughty
G01 - MEASURING TESTING
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Patent Application
WAFER SLIP DETECTION DURING CMP PROCESSING
Publication number
20150117755
Publication date
Apr 30, 2015
International Business Machines Corporation
John R. Doughty
G06 - COMPUTING CALCULATING COUNTING