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John Robert Fairhurst
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Plaistow, NH, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method and apparatus for clamping and cooling a substrate for ion i...
Patent number
9,520,264
Issue date
Dec 13, 2016
Varian Semiconductor Equipment Associates, Inc.
Jeffrey E. Krampert
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for holding a plurality of substrates for proc...
Patent number
9,218,990
Issue date
Dec 22, 2015
Varian Semiconductor Equipment Associates, Inc.
John Robert Fairhurst
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for removing a vertically-oriented substrate f...
Patent number
9,070,730
Issue date
Jun 30, 2015
Varian Semiconductor Equipment Associates, Inc.
John Robert Fairhurst
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Method and apparatus for lifting a horizontally-oriented substrate...
Patent number
8,585,115
Issue date
Nov 19, 2013
Varian Semiconductor Equipment Associates, Inc.
John Robert Fairhurst
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for manipulating a substrate
Patent number
8,550,520
Issue date
Oct 8, 2013
Varian Semiconductor Equipment Associates, Inc.
John Robert Fairhurst
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Method and Apparatus for Clamping and Cooling a Substrate for ION I...
Publication number
20130240759
Publication date
Sep 19, 2013
Varian Semiconductor Equipment Associates, Inc.
Jeffrey E. Krampert
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND APPARATUS FOR REMOVING A VERTICALLY-ORIENTED SUBSTRATE F...
Publication number
20130089395
Publication date
Apr 11, 2013
Varian Semiconductor Equipment Associates, Inc.
John Robert Fairhurst
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR LIFTING A HORIZONTALLY-ORIENTED SUBSTRATE...
Publication number
20130088028
Publication date
Apr 11, 2013
Varian Semiconductor Equipment Associates, Inc.
John Robert Fairhurst
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR HOLDING A PLURALITY OF SUBSTRATES FOR PROC...
Publication number
20130089403
Publication date
Apr 11, 2013
Varian Semiconductor Equipment Associates, Inc.
John Robert Fairhurst
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR MANIPULATING A SUBSTRATE
Publication number
20130088030
Publication date
Apr 11, 2013
Varian Semiconductor Equipment Associates, Inc.
John Robert Fairhurst
H01 - BASIC ELECTRIC ELEMENTS