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John Robinson
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Austin, TX, US
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Patents Grants
last 30 patents
Information
Patent Grant
Systems and methods for semiconductor adaptive testing using inline...
Patent number
11,798,827
Issue date
Oct 24, 2023
KLA Corporation
Robert J. Rathert
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for semiconductor defect-guided burn-in and sys...
Patent number
11,624,775
Issue date
Apr 11, 2023
KLA Corporation
Robert J. Rathert
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for Z-PAT defect-guided statistical outlier detec...
Patent number
11,614,480
Issue date
Mar 28, 2023
KLA Corporation
David W. Price
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Advanced in-line part average testing
Patent number
11,293,970
Issue date
Apr 5, 2022
KLA Corporation
David W. Price
G01 - MEASURING TESTING
Information
Patent Grant
Methods and systems for creating or performing a dynamic sampling s...
Patent number
10,649,447
Issue date
May 12, 2020
KLA-Tencor Corp.
Pavel Izikson
G05 - CONTROLLING REGULATING
Information
Patent Grant
System and method for field-by-field overlay process control using...
Patent number
10,466,596
Issue date
Nov 5, 2019
KLA-Tencor Corporation
Bill Pierson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Overlay control with non-zero offset prediction
Patent number
10,409,171
Issue date
Sep 10, 2019
KLA-Tencor Corporation
Michael E. Adel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Feed forward of metrology data in a metrology system
Patent number
9,903,711
Issue date
Feb 27, 2018
KLA-Tencor Corporation
Ady Levy
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods and systems for creating or performing a dynamic sampling s...
Patent number
9,651,943
Issue date
May 16, 2017
KLA-Tencor Corp.
Pavel Izikson
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method and system for providing process tool correctables using an...
Patent number
9,620,426
Issue date
Apr 11, 2017
KLA-Tencor Corporation
Pavel Izikson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Feedforward/feedback litho process control of stress and overlay
Patent number
9,116,442
Issue date
Aug 25, 2015
KLA-Tencor Corporation
Michael Adel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Inspecting a wafer and/or predicting one or more characteristics of...
Patent number
8,948,495
Issue date
Feb 3, 2015
KLA-Tencor Corp.
Gino Marcuccilli
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Unique mark and method to determine critical dimension uniformity a...
Patent number
8,804,137
Issue date
Aug 12, 2014
KLA-Tencor Corporation
DongSub Choi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods and systems for creating or performing a dynamic sampling s...
Patent number
8,175,831
Issue date
May 8, 2012
KLA-Tencor Corp.
Pavel Izikson
G05 - CONTROLLING REGULATING
Information
Patent Grant
Feedforward/feedback litho process control of stress and overlay
Patent number
8,111,376
Issue date
Feb 7, 2012
KLA-Tencor Corporation
Michael Adel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Overlay metrology and control method
Patent number
7,804,994
Issue date
Sep 28, 2010
KLA-Tencor Technologies Corporation
Michael Adel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and system for optimizing alignment performance in a fleet o...
Patent number
7,679,069
Issue date
Mar 16, 2010
KLA-Tencor Technologies Corporation
Michael E. Adel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Use of overlay diagnostics for enhanced automatic process control
Patent number
7,310,789
Issue date
Dec 18, 2007
KLA-Tencor Technologies Corporation
Joel L. Seligson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Use of overlay diagnostics for enhanced automatic process control
Patent number
7,111,256
Issue date
Sep 19, 2006
KLA-Tencor Technologies Corporation
Joel L. Seligson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Use of overlay diagnostics for enhanced automatic process control
Patent number
6,928,628
Issue date
Aug 9, 2005
KLA-Tencor Technologies Corporation
Joel L. Seligson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Raman spectrometer
Patent number
5,786,893
Issue date
Jul 28, 1998
Board of Regents, The University of Texas System
Manfred F. Fink
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
SYSTEM FOR AUTOMATIC DIAGNOSTICS AND MONITORING OF SEMICONDUCTOR DE...
Publication number
20230236132
Publication date
Jul 27, 2023
KLA Corporation
David W. Price
G01 - MEASURING TESTING
Information
Patent Application
SYSTEMS AND METHODS FOR SEMICONDUCTOR DEFECT-GUIDED BURN-IN AND SY...
Publication number
20220390505
Publication date
Dec 8, 2022
Robert J. Rathert
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR Z-PAT DEFECT-GUIDED STATISTICAL OUTLIER DETEC...
Publication number
20220390506
Publication date
Dec 8, 2022
KLA Corporartion
David W. Price
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR SEMICONDUCTOR ADAPTIVE TESTING USING INLIN...
Publication number
20220359247
Publication date
Nov 10, 2022
Robert J. Rathert
G05 - CONTROLLING REGULATING
Information
Patent Application
IMAGING REFLECTOMETRY FOR INLINE SCREENING
Publication number
20220307990
Publication date
Sep 29, 2022
John Charles Robinson
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SYSTEM AND METHOD FOR AUTOMATICALLY IDENTIFYING DEFECT-BASED TEST...
Publication number
20220196723
Publication date
Jun 23, 2022
David W. Price
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ADVANCED IN-LINE PART AVERAGE TESTING
Publication number
20210215753
Publication date
Jul 15, 2021
KLA Corporation
David W. Price
G01 - MEASURING TESTING
Information
Patent Application
Overlay Control with Non-Zero Offset Prediction
Publication number
20180253017
Publication date
Sep 6, 2018
KLA-Tencor Corporation
Michael E. Adel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Methods and Systems for Creating or Performing a Dynamic Sampling S...
Publication number
20170255188
Publication date
Sep 7, 2017
KLA-Tencor Corporation
Pavel Izikson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Feed Forward of Metrology Data in a Metrology System
Publication number
20160290796
Publication date
Oct 6, 2016
KLA-Tencor Corporation
Ady Levy
G01 - MEASURING TESTING
Information
Patent Application
System and Method for Field-By-Field Overlay Process Control Using...
Publication number
20150241790
Publication date
Aug 27, 2015
KLA-Tencor Corporation
Bill Pierson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SYSTEM AND METHOD FOR THE AUTOMATIC DETERMINATION OF CRITICAL PARAM...
Publication number
20140303912
Publication date
Oct 9, 2014
KLA-Tencor Corporation
Saibal Banerjee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Inspecting a Wafer and/or Predicting One or More Characteristics of...
Publication number
20140037187
Publication date
Feb 6, 2014
Gino Marcuccilli
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Methods and Systems for Creating or Performing a Dynamic Sampling S...
Publication number
20120208301
Publication date
Aug 16, 2012
KLA-Tencor Corporation
Pavel Izikson
G05 - CONTROLLING REGULATING
Information
Patent Application
FEEDFORWARD/FEEDBACK LITHO PROCESS CONTROL OF STRESS AND OVERLAY
Publication number
20120094400
Publication date
Apr 19, 2012
KLA-Tencor Corporation
Michael Adel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND SYSTEM FOR PROVIDING PROCESS TOOL CORRECTABLES USING AN...
Publication number
20110202298
Publication date
Aug 18, 2011
KLA-Tencor Corporation
Pavel Izikson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
UNIQUE MARK AND METHOD TO DETERMINE CRITICAL DIMENSION UNIFORMITY A...
Publication number
20110051150
Publication date
Mar 3, 2011
KLA-Tencor Corporation
DongSub Choi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FEEDFORWARD/FEEDBACK LITHO PROCESS CONTROL OF STRESS AND OVERLAY
Publication number
20080316442
Publication date
Dec 25, 2008
KLA-Tencor Corporation
Michael Adel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS AND SYSTEMS FOR CREATING OR PERFORMING A DYNAMIC SAMPLING S...
Publication number
20080286885
Publication date
Nov 20, 2008
Pavel Izikson
G05 - CONTROLLING REGULATING
Information
Patent Application
METHOD AND SYSTEM FOR OPTIMIZING ALIGNMENT PERFORMANCE IN A FLEET O...
Publication number
20080073589
Publication date
Mar 27, 2008
KLA-Tencor Technologies Corporation
Michael E. Adel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Use of overlay diagnostics for enhanced automatic process control
Publication number
20060280357
Publication date
Dec 14, 2006
KLA-Tencor Technologies, Corporation
Joel L. Seligson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Use of overlay diagnostics for enhanced automatic process control
Publication number
20040040003
Publication date
Feb 26, 2004
KLA-Tencor Technologies, Corporation
Joel L. Seligson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Use of overlay diagnostics for enhanced automatic process control
Publication number
20040038455
Publication date
Feb 26, 2004
KLA-Tencor Technologies, Corporation
Joel L. Seligson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Overlay metrology and control method
Publication number
20030223630
Publication date
Dec 4, 2003
KLA-Tencor Corporation
Michael Adel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY