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John S. Taylor
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Livermore, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Figure correction of multilayer coated optics
Patent number
7,662,263
Issue date
Feb 16, 2010
EUV LLC
Henry N. Chapman
G01 - MEASURING TESTING
Information
Patent Grant
Etched-multilayer phase shifting masks for EUV lithography
Patent number
6,875,543
Issue date
Apr 5, 2005
EUV Limited Liability Corporation
Henry N. Chapman
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Correction of localized shape errors on optical surfaces by alterin...
Patent number
6,844,272
Issue date
Jan 18, 2005
EUV Limited Liability Corporation
John S. Taylor
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Low-cost method for producing extreme ultraviolet lithography optics
Patent number
6,634,760
Issue date
Oct 21, 2003
The Regents of the University of California
James A. Folta
G02 - OPTICS
Information
Patent Grant
Coatings on reflective mask substrates
Patent number
6,352,803
Issue date
Mar 5, 2002
The Regents of the University of California
William Man-Wai Tong
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Precision non-contact polishing tool
Patent number
5,591,068
Issue date
Jan 7, 1997
Regents of the University of California
John S. Taylor
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
Correcting surface contour of a non-rigid object through control of...
Publication number
20040100638
Publication date
May 27, 2004
The Regents of the University of California.
James A. Folta
G02 - OPTICS
Information
Patent Application
Figure correction of multilayer coated optics
Publication number
20040061868
Publication date
Apr 1, 2004
The Regents of the University of California.
Henry N. Chapman
G01 - MEASURING TESTING
Information
Patent Application
Etched-multilayer phase shifting masks for EUV lithography
Publication number
20040062998
Publication date
Apr 1, 2004
The Regents of the University of California.
Henry N. Chapman
B82 - NANO-TECHNOLOGY
Information
Patent Application
Correction of localized shape errors on optical surfaces by alterin...
Publication number
20030164949
Publication date
Sep 4, 2003
The Regents of the University of California.
John S. Taylor
B82 - NANO-TECHNOLOGY
Information
Patent Application
Low-cost method for producing extreme ultraviolet lithography optics
Publication number
20030043483
Publication date
Mar 6, 2003
The Regents of the University of California.
James A. Folta
G02 - OPTICS