John Scanlan

Person

Waterford, IE

People

Patents Grantslast 30 patents

Information Patent Grant
Method for process control of semiconductor manufacturing equipment
- Patent number 7,062,411
- Issue date Jun 13, 2006
- Scientific Systems Research Limited
- Michael Hopkins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma chamber cleaning
- Patent number 6,855,209
- Issue date Feb 15, 2005
- Scientific Systems Research Limited
- John Scanlan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fault classification in a plasma process chamber
- Patent number 6,826,489
- Issue date Nov 30, 2004
- Scientific Systems Research Limited
- John Scanlan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fault detection in a plasma process
- Patent number 6,781,383
- Issue date Aug 24, 2004
- Scientific System Research Limited
- Kevin O'Leary
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Endpoint detection in the etching of dielectric layers
- Patent number 6,677,246
- Issue date Jan 13, 2004
- Scientific Systems Research Ltd.
- John Scanlan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma chamber conditioning
- Patent number 6,656,848
- Issue date Dec 2, 2003
- Scientific Systems Research Limited
- John Scanlan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fault identification in a plasma process
- Patent number 6,441,620
- Issue date Aug 27, 2002
- John Scanlan
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method and system for detecting electrical arcing in a plasma proce...
- Publication number 20050212450
- Publication date Sep 29, 2005
- Scientific Systems Research Limited
- Francisco Martinez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for process control of semiconductor manufactiring equipment
- Publication number 20040254762
- Publication date Dec 16, 2004
- Michael Hopkins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for fault detection in a plasma process
- Publication number 20040055868
- Publication date Mar 25, 2004
- Scientific Systems Research Limited
- Kevin O'Leary
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma chamber cleaning
- Publication number 20030159715
- Publication date Aug 28, 2003
- Scientific Systems Research Limited
- John Scanlan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Fault classification in a plasma process chamber
- Publication number 20030153989
- Publication date Aug 14, 2003
- John Scanlan
- G05 - CONTROLLING REGULATING
Information Patent Application
Endpoint detection in the etching of dielectric layers
- Publication number 20020048960
- Publication date Apr 25, 2002
- John Scanlan
- H01 - BASIC ELECTRIC ELEMENTS

John Scanlan

Person

Patents Grantslast 30 patents

Method for process control of semiconductor manufacturing equipment

Plasma chamber cleaning

Fault classification in a plasma process chamber

Method for fault detection in a plasma process

Endpoint detection in the etching of dielectric layers

Plasma chamber conditioning

Method for fault identification in a plasma process

Patents Applicationslast 30 patents

Method and system for detecting electrical arcing in a plasma proce...

Method for process control of semiconductor manufactiring equipment

Method for fault detection in a plasma process

Plasma chamber cleaning

Fault classification in a plasma process chamber

Endpoint detection in the etching of dielectric layers