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John Scott Hallock
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Potomac, MD, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method of photoresist ash residue removal
Patent number
6,734,120
Issue date
May 11, 2004
Axcelis Technologies, Inc.
Ivan Berry
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for reducing edge roughness in patterned photoresist
Patent number
6,709,807
Issue date
Mar 23, 2004
Axcelis Technologies, Inc.
John S. Hallock
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Process for reducing edge roughness in patterned photoresist
Patent number
6,582,891
Issue date
Jun 24, 2003
Axcelis Technologies, Inc.
John S. Hallock
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Process for removal of photoresist after post ion implantation
Patent number
6,524,936
Issue date
Feb 25, 2003
Axcelis Technologies, Inc.
John Scott Hallock
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
UV assisted chemical modification of photoresist
Patent number
6,503,693
Issue date
Jan 7, 2003
Axcelis Technologies, Inc.
Robert Douglas Mohondro
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Oxygen scavenger compositions
Patent number
6,387,461
Issue date
May 14, 2002
Cryovac, Inc.
Cynthia Louise Ebner
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Oxygen scavenging system and compositions
Patent number
6,258,883
Issue date
Jul 10, 2001
Cryovac, Inc.
Cynthia Louise Ebner
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Patents Applications
last 30 patents
Information
Patent Application
Drying process for low-k dielectric films
Publication number
20040099283
Publication date
May 27, 2004
Axcelis Technologies, Inc.
Carlo Waldfried
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Process for reducing edge roughness in patterned photoresist
Publication number
20030049571
Publication date
Mar 13, 2003
Axcelis Technologies, Inc.
John S. Hallock
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Application
Process for removal of photoresist after post ion implantation
Publication number
20020151156
Publication date
Oct 17, 2002
John Scott Hallock
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY