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John Shamaly
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Wilton, CT, US
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Patents Grants
last 30 patents
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Patent Grant
Catadioptric lithography system and method with reticle stage ortho...
Patent number
6,977,716
Issue date
Dec 20, 2005
ASML Holding N.V.
Harry Sewell
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Catadioptric lithography system and method with reticle stage ortho...
Patent number
6,757,110
Issue date
Jun 29, 2004
ASML Holding N.V.
Harry Sewell
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Catadioptric lithography system and method with reticle stage ortho...
Publication number
20040201830
Publication date
Oct 14, 2004
Harry Sewell
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Catadioptric lithography system and method with reticle stage ortho...
Publication number
20030223125
Publication date
Dec 4, 2003
ASML US, Inc.
Harry Sewell
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY