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John SLOCUM
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Medford, MA, US
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last 30 patents
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Patent Grant
Gas delivery system for an ion source
Patent number
8,003,954
Issue date
Aug 23, 2011
Varian Semiconductor Equipment Associates, Inc.
John Slocum
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
GAS DELIVERY SYSTEM FOR AN ION SOURCE
Publication number
20090289197
Publication date
Nov 26, 2009
Varian Semiconductor Equipment Associates, Inc.
John SLOCUM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TECHNIQUES FOR MEASURING AND CONTROLLING ION BEAM ANGLE AND DENSITY...
Publication number
20090121122
Publication date
May 14, 2009
Varian Semiconductor Equipment Associates, Inc.
Peter L. Kellerman
H01 - BASIC ELECTRIC ELEMENTS