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John SOLIS
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Austin, TX, US
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last 30 patents
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Patent Grant
Virtual metrology model based seasoning optimization
Patent number
12,032,355
Issue date
Jul 9, 2024
Tokyo Electron Limited
Jun Shinagawa
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
VIRTUAL METROLOGY MODEL BASED SEASONING OPTIMIZATION
Publication number
20230315047
Publication date
Oct 5, 2023
TOKYO ELECTRON LIMITED
Jun SHINAGAWA
G05 - CONTROLLING REGULATING