John Szilagyi

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Milpitas, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Laser-sustained plasma source based on colliding liquid jets
- Patent number 12,033,845
- Issue date Jul 9, 2024
- KLA Corporation
- John Szilagyi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for vacuum ultraviolet lamp assisted ignition of...
- Patent number 11,844,172
- Issue date Dec 12, 2023
- KLA Corporation
- John Szilagyi
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Laser sustained plasma light source with forced flow through natura...
- Patent number 10,690,589
- Issue date Jun 23, 2020
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD FOR VACUUM ULTRAVIOLET LAMP ASSISTED IGNITION OF...
- Publication number 20240138048
- Publication date Apr 25, 2024
- KLA Corporation
- John Szilagyi
- C01 - INORGANIC CHEMISTRY
Information Patent Application
LASER-SUSTAINED PLASMA SOURCE BASED ON COLLIDING LIQUID JETS
- Publication number 20230335389
- Publication date Oct 19, 2023
- KLA Corporation
- John Szilagyi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Vacuum Ultraviolet Lamp Assisted Ignition of...
- Publication number 20210120659
- Publication date Apr 22, 2021
- KLA Corporation
- John Szilagyi
- C01 - INORGANIC CHEMISTRY
Information Patent Application
Laser Sustained Plasma Light Source with Forced Flow Through Natura...
- Publication number 20190033204
- Publication date Jan 31, 2019
- KLA-Tencor Corporation
- Ilya Bezel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR