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John Viatella
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San Diego, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Beam shaping slit for small spot size transmission small angle X-ra...
Patent number
10,359,377
Issue date
Jul 23, 2019
KLA-Tencor Corporation
Alexander Bykanov
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Very high power laser chamber optical improvements
Patent number
8,982,922
Issue date
Mar 17, 2015
Cymer, LLC
Hong Ye
G02 - OPTICS
Information
Patent Grant
Very high power laser chamber optical improvements
Patent number
8,284,815
Issue date
Oct 9, 2012
Cymer, Inc.
Hong Ye
G02 - OPTICS
Information
Patent Grant
LPP EUV drive laser input system
Patent number
7,402,825
Issue date
Jul 22, 2008
Cymer, Inc.
Rodney D. Simmons
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
EUV light source
Patent number
7,323,703
Issue date
Jan 29, 2008
Cymer, Inc.
I. Roger Oliver
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
EUV light source
Patent number
7,164,144
Issue date
Jan 16, 2007
Cymer Inc.
William N. Partlo
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Patents Applications
last 30 patents
Information
Patent Application
Beam Shaping Slit For Small Spot Size Transmission Small Angle X-Ra...
Publication number
20170307548
Publication date
Oct 26, 2017
KLA-Tencor Corporation
Alexander Bykanov
G01 - MEASURING TESTING
Information
Patent Application
VERY HIGH POWER LASER CHAMBER OPTICAL IMPROVEMENTS
Publication number
20120307858
Publication date
Dec 6, 2012
Hong Ye
G02 - OPTICS
Information
Patent Application
VERY HIGH POWER LASER CHAMBER OPTICAL IMPROVEMENTS
Publication number
20100098120
Publication date
Apr 22, 2010
Hong Ye
G02 - OPTICS
Information
Patent Application
EUV light source
Publication number
20070158596
Publication date
Jul 12, 2007
I. Roger Oliver
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
LPP EUV drive laser input system
Publication number
20060289806
Publication date
Dec 28, 2006
Cymer, Inc.
Rodney D. Simmons
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EUV light source
Publication number
20050199829
Publication date
Sep 15, 2005
William N. Partlo
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR