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John W. Nelson
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Algodones, NM, US
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last 30 patents
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Patent Grant
Lithography laser with beam delivery and beam pointing control
Patent number
7,230,964
Issue date
Jun 12, 2007
Cymer, Inc.
Plash P. Das
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Lithography laser with beam delivery and beam pointing control
Publication number
20040022291
Publication date
Feb 5, 2004
Plash P. Das
G02 - OPTICS