John W. Vanderpot

Person

Boxford, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Beam stop and beam tuning methods
- Patent number 7,579,604
- Issue date Aug 25, 2009
- Axcelis Technologies. Inc.
- John W. Vanderpot
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particulate prevention in ion implantation
- Patent number 7,547,898
- Issue date Jun 16, 2009
- Axcelis Technologies, Inc.
- Donald W. Berrian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged beam dump and particle attractor
- Patent number 7,547,899
- Issue date Jun 16, 2009
- Axcelis Technologies, Inc.
- John W. Vanderpot
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam profiler
- Patent number 7,381,977
- Issue date Jun 3, 2008
- Axcelis Technologies, Inc.
- John D. Pollock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reciprocating drive for scanning a workpiece
- Patent number 7,323,695
- Issue date Jan 29, 2008
- Axcelis Technologies, Inc.
- John W. Vanderpot
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for reciprocating a workpiece through an ion beam
- Patent number 7,141,809
- Issue date Nov 28, 2006
- Axcelis Technologies, Inc.
- John W. Vanderpot
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reciprocating drive for scanning a workpiece through an ion beam
- Patent number 7,135,691
- Issue date Nov 14, 2006
- Axcelis Technologies, Inc.
- John W. Vanderpot
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate positioning system
- Patent number 6,921,907
- Issue date Jul 26, 2005
- Axcelis Technologies, Inc.
- John W. Vanderpot
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate positioning system
- Patent number 6,777,687
- Issue date Aug 17, 2004
- Axcelis Technologies, Inc.
- John W. Vanderpot
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hybrid scanning system and methods for ion implantation
- Patent number 6,765,219
- Issue date Jul 20, 2004
- Variah Semiconductor Equipment Associates, Inc.
- Donald W. Berrian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compact load lock system for ion beam processing of foups
- Patent number 6,428,262
- Issue date Aug 6, 2002
- Proteros, LLC
- John W. Vanderpot
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning system with linear gas bearings and active counter-balance...
- Patent number 6,172,372
- Issue date Jan 9, 2001
- Varian Semiconductor Equipment Associates, Inc.
- John W. Vanderpot
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Encapsulated thermofoil heater apparatus and associated methods
- Patent number 6,082,297
- Issue date Jul 4, 2000
- Novellus Sytems, Inc.
- John D. Pollock
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microfeature wafer handling apparatus and methods
- Patent number 5,984,391
- Issue date Nov 16, 1999
- Novellus Systems, Inc.
- John W. Vanderpot
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Disposable electronic monitor device
- Patent number RE36200
- Issue date Apr 27, 1999
- Sensitech Inc.
- Donald W. Berrian
- 073 - Measuring and testing
Information Patent Grant
Apparatus and method for igniting plasma in a process module
- Patent number 5,789,867
- Issue date Aug 4, 1998
- TEL America, Inc.
- Han Westendorp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Titanium nitride and multilayers formed by chemical vapor depositio...
- Patent number 5,595,784
- Issue date Jan 21, 1997
- Robert Kaim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for igniting plasma in a process module
- Patent number 5,565,036
- Issue date Oct 15, 1996
- TEL America, Inc.
- Han Westendorp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Disposable electronic monitor device
- Patent number 5,313,848
- Issue date May 24, 1994
- Sensitech, Inc.
- Ernest M. Santin
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for high efficiency scanning in an ion implanter
- Patent number 4,980,562
- Issue date Dec 25, 1990
- Varian Associates, Inc.
- Donald W. Berrian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam scanning method and apparatus
- Patent number 4,922,106
- Issue date May 1, 1990
- Varian Associates, Inc.
- Donald W. Berrian
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Ion beam profiler
- Publication number 20070069156
- Publication date Mar 29, 2007
- Axcelis Technologies, Inc.
- John D. Pollock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged beam dump and particle attractor
- Publication number 20060284117
- Publication date Dec 21, 2006
- John W. Vanderpot
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Particulate prevention in ion implantation
- Publication number 20060284116
- Publication date Dec 21, 2006
- Donald W. Berrian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Beam stop and beam tuning methods
- Publication number 20060284071
- Publication date Dec 21, 2006
- John W. Vanderpot
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for reciprocating a workpiece through an ion beam
- Publication number 20050232749
- Publication date Oct 20, 2005
- John W. Vanderpot
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Reciprocating drive for scanning a workpiece through an ion beam
- Publication number 20050230643
- Publication date Oct 20, 2005
- John W. Vanderpot
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Reciprocating drive for scanning a workpiece
- Publication number 20050232748
- Publication date Oct 20, 2005
- John W. Vanderpot
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate positioning system
- Publication number 20040245480
- Publication date Dec 9, 2004
- John W. Vanderpot
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate positioning system
- Publication number 20020134950
- Publication date Sep 26, 2002
- John W. Vanderpot
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate positioning system
- Publication number 20020125446
- Publication date Sep 12, 2002
- John W. Vanderpot
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Hybrid scanning system and methods for ion implantation
- Publication number 20020109106
- Publication date Aug 15, 2002
- Donald W. Berrian
- H01 - BASIC ELECTRIC ELEMENTS

John W. Vanderpot

Person

Patents Grantslast 30 patents

Beam stop and beam tuning methods

Particulate prevention in ion implantation

Charged beam dump and particle attractor

Ion beam profiler

Reciprocating drive for scanning a workpiece

Method for reciprocating a workpiece through an ion beam

Reciprocating drive for scanning a workpiece through an ion beam

Substrate positioning system

Substrate positioning system

Hybrid scanning system and methods for ion implantation

Compact load lock system for ion beam processing of foups

Scanning system with linear gas bearings and active counter-balance...

Encapsulated thermofoil heater apparatus and associated methods

Microfeature wafer handling apparatus and methods

Disposable electronic monitor device

Apparatus and method for igniting plasma in a process module

Titanium nitride and multilayers formed by chemical vapor depositio...

Apparatus and method for igniting plasma in a process module

Disposable electronic monitor device

Method and apparatus for high efficiency scanning in an ion implanter

Ion beam scanning method and apparatus

Patents Applicationslast 30 patents

Ion beam profiler

Charged beam dump and particle attractor

Particulate prevention in ion implantation

Beam stop and beam tuning methods

Method for reciprocating a workpiece through an ion beam

Reciprocating drive for scanning a workpiece through an ion beam

Reciprocating drive for scanning a workpiece

Substrate positioning system

Substrate positioning system

Substrate positioning system

Hybrid scanning system and methods for ion implantation