John Walker

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Escondido, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Discharge produced plasma EUV light source
- Patent number 7,180,081
- Issue date Feb 20, 2007
- Cymer, Inc.
- John Walker
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING

Patents Applicationslast 30 patents

Information Patent Application
Discharge produced plasma EUV light source
- Publication number 20040160155
- Publication date Aug 19, 2004
- William N. Partlo
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR