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JOHN ZHU
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WAPPINGERS FALLS, NY, US
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last 30 patents
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Patent Grant
Method and apparatus for resist planarization
Patent number
6,440,638
Issue date
Aug 27, 2002
International Business Machines Corp.
John Golz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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last 30 patents
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Patent Application
METHOD AND APPARATUS FOR RESIST PLANARIZATION
Publication number
20010006761
Publication date
Jul 5, 2001
JOHN GOLZ
H01 - BASIC ELECTRIC ELEMENTS