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Johnny PHAM
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San Jose, CA, US
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last 30 patents
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Patent Application
POLYMERIC COATING FOR SEMICONDUCTOR PROCESSING CHAMBER COMPONENTS
Publication number
20240120180
Publication date
Apr 11, 2024
LAM RESEARCH CORPORATION
Yuanping SONG
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
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Patent Application
METHOD FOR CONDITIONING SEMICONDUCTOR PROCESSING CHAMBER COMPONENTS
Publication number
20230092570
Publication date
Mar 23, 2023
LAM RESEARCH CORPORATION
Lin XU
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR