Joke Van Aelst

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Heusden-Zolder, BE

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Patents Grantslast 30 patents

Information Patent Grant
High aspect ratio via etch
- Patent number 7,807,583
- Issue date Oct 5, 2010
- IMEC
- Joke Van Aelst
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
HIGH ASPECT RATIO VIA ETCH
- Publication number 20080050919
- Publication date Feb 28, 2008
- Interuniversitair Microelektronica Centrum (IMEC)
- Joke Van Aelst
- B81 - MICRO-STRUCTURAL TECHNOLOGY