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Jon MacErnie
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Chandler, AZ, US
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last 30 patents
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Patent Grant
Wafer cleaning apparatus and associated wafer processing methods
Patent number
6,368,183
Issue date
Apr 9, 2002
SpeedFam-IPEC Corporation
Daniel Trojan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Mapping system for semiconductor wafer cassettes
Patent number
6,364,745
Issue date
Apr 2, 2002
SpeedFam-IPEC Corporation
Jose R. Gonzalez-Martin
B24 - GRINDING POLISHING
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Patent Grant
Combined CMP and wafer cleaning apparatus and associated methods
Patent number
6,350,177
Issue date
Feb 26, 2002
SpeedFam-IPEC Corporation
Jose R. Gonzalez-Martin
B24 - GRINDING POLISHING
Information
Patent Grant
Integral machine for polishing, cleaning, rinsing and drying workpi...
Patent number
6,213,853
Issue date
Apr 10, 2001
SpeedFam-IPEC Corporation
Jose R. Gonzalez-Martin
B24 - GRINDING POLISHING
Information
Patent Grant
Post-CMP wet-HF cleaning station
Patent number
6,125,861
Issue date
Oct 3, 2000
SpeedFam-IPEC Corporation
Anand Gupta
H01 - BASIC ELECTRIC ELEMENTS