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Jonas ANDERSSON
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Espoo, FI
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Patents Grants
last 30 patents
Information
Patent Grant
Loading device, arrangement and method for loading a reaction chamber
Patent number
12,180,588
Issue date
Dec 31, 2024
Beneq Oy
Johannes Wesslin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Vacuum chamber and arrangement for atomic layer deposition
Patent number
12,180,587
Issue date
Dec 31, 2024
Beneq Oy
Johannes Wesslin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Atomic layer deposition reactor arrangement and a method for operat...
Patent number
12,116,668
Issue date
Oct 15, 2024
Beneq Oy
Jonas Andersson
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas feeding cup and a gas manifold assembly
Patent number
12,104,248
Issue date
Oct 1, 2024
Beneq Oy
Pekka Soininen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Atomic layer deposition apparatus
Patent number
11,926,896
Issue date
Mar 12, 2024
Beneq Oy
Johannes Wesslin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
ATOMIC LAYER DEPOSITION REACTOR ARRANGEMENT AND A METHOD FOR OPERAT...
Publication number
20240043998
Publication date
Feb 8, 2024
BENEQ OY
Jonas ANDERSSON
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VACUUM CHAMBER AND ARRANGEMENT FOR ATOMIC LAYER DEPOSITION
Publication number
20240026535
Publication date
Jan 25, 2024
BENEQ OY
Johannes WESSLIN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LOADING DEVICE, ARRANGEMENT AND METHOD FOR LOADING A REACTION CHAMBER
Publication number
20240026536
Publication date
Jan 25, 2024
BENEQ OY
Johannes WESSLIN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS FEEDING CUP AND A GAS MANIFOLD ASSEMBLY
Publication number
20240018651
Publication date
Jan 18, 2024
BENEQ OY
Pekka SOININEN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ATOMIC LAYER DEPOSITION APPARATUS
Publication number
20240018652
Publication date
Jan 18, 2024
BENEQ OY
Johannes WESSLIN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...