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Jonas Mertes
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Eindhoven, NL
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Patents Grants
last 30 patents
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Patent Grant
Radiation conditioning system, illumination system and metrology ap...
Patent number
10,303,064
Issue date
May 28, 2019
ASML Netherlands B.V.
Sebastianus Adrianus Goorden
G02 - OPTICS
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last 30 patents
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Patent Application
Radiation Conditioning System, Illumination System And Metrology Ap...
Publication number
20170329232
Publication date
Nov 16, 2017
ASM Netherlands B.V.
Sebastianus Adrianus GOORDEN
G01 - MEASURING TESTING