Jonathan Church

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Portland, OR, US

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Patents Grantslast 30 patents

Information Patent Grant
Method for depositing high deposition rate, thick tetraethyl orthos...
- Patent number 10,358,717
- Issue date Jul 23, 2019
- Lam Research Corporation
- Keith Fox
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rapid chamber clean using concurrent in-situ and remote plasma sources
- Patent number 10,161,034
- Issue date Dec 25, 2018
- Lam Research Corporation
- Keith Fox
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
MULTI-CHANNEL LIQUID DELIVERY SYSTEM FOR ADVANCED SEMICONDUCTOR APP...
- Publication number 20220139730
- Publication date May 5, 2022
- Miguel Benjamin VASQUEZ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW STRESS FILMS FOR ADVANCED SEMICONDUCTOR APPLICATIONS
- Publication number 20220068636
- Publication date Mar 3, 2022
- LAM RESEARCH CORPORATION
- Reza Bayati
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DEPOSITING HIGH DEPOSITION RATE, THICK TETRAETHYL ORTHOS...
- Publication number 20180305812
- Publication date Oct 25, 2018
- LAM RESEARCH CORPORATION
- Keith Fox
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RAPID CHAMBER CLEAN USING CONCURRENT IN-SITU AND REMOTE PLASMA SOURCES
- Publication number 20180305814
- Publication date Oct 25, 2018
- LAM RESEARCH CORPORATION
- Keith Fox
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...