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Jonathan D. Grava
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San Diego, CA, US
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last 30 patents
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Patent Grant
System and method for protecting a seed laser in an EUV light sourc...
Patent number
8,848,277
Issue date
Sep 30, 2014
ASML Netherlands B.V.
Richard L. Sandstrom
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
System and Method for Protecting a Seed Laser in an EUV Light Sourc...
Publication number
20130322482
Publication date
Dec 5, 2013
Cymer, Inc.
Richard L. Sandstrom
H01 - BASIC ELECTRIC ELEMENTS