Jong-Cheon SUN

Person

Seoul, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and method of processing a substrate
- Patent number 11,837,496
- Issue date Dec 5, 2023
- Samsung Electronics Co., Ltd.
- Jong Woo Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method of processing a substrate
- Patent number 11,791,194
- Issue date Oct 17, 2023
- Samsung Electronics Co., Ltd.
- Jong Woo Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing method, plasma processing apparatus and method of...
- Patent number 11,521,866
- Issue date Dec 6, 2022
- Samsung Electronics Co., Ltd.
- Seung-Yoon Song
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 11,521,836
- Issue date Dec 6, 2022
- Samsung Electronics Co., Ltd.
- Eun-Woo Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Loadlock module and semiconductor manufacturing apparatus including...
- Patent number 11,501,987
- Issue date Nov 15, 2022
- Samsung Electronics Co., Ltd.
- Kwang-Nam Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for manufacturing semiconductor device and manufacturing...
- Patent number 11,437,264
- Issue date Sep 6, 2022
- Samsung Electronics Co., Ltd.
- Jung Mo Sung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and method of manufacturing semiconduct...
- Patent number 11,437,222
- Issue date Sep 6, 2022
- Samsung Electronics Co., Ltd.
- Jung-Pyo Hong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for providing gas to a plasma chamber and a plasma processin...
- Patent number 11,289,309
- Issue date Mar 29, 2022
- Samsung Electronics Co., Ltd.
- Hyung Jun Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of controlling uniformity of plasma and plasma processing sy...
- Patent number 11,282,678
- Issue date Mar 22, 2022
- Samsung Electronics Co., Ltd.
- Dong-Hyeon Na
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support apparatus and plasma processing apparatus having...
- Patent number 11,037,766
- Issue date Jun 15, 2021
- Samsung Electronics Co., Ltd.
- Kwang-Nam Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing method, plasma processing apparatus and method of...
- Patent number 11,037,806
- Issue date Jun 15, 2021
- Samsung Electronics Co., Ltd.
- Seung-Yoon Song
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus including edge ring
- Patent number 11,018,046
- Issue date May 25, 2021
- Samsung Electronics Co., Ltd.
- Jong Woo Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Loadlock module and semiconductor manufacturing apparatus including...
- Patent number 10,971,382
- Issue date Apr 6, 2021
- Samsung Electronics Co., Ltd.
- Kwang-Nam Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for manufacturing semiconductor device and manufacturing...
- Patent number 10,964,578
- Issue date Mar 30, 2021
- Samsung Electronics Co., Ltd.
- Jung Mo Sung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 10,903,053
- Issue date Jan 26, 2021
- Samsung Electronics Co., Ltd.
- Hak Young Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma monitoring apparatus and plasma processing system
- Patent number 10,825,666
- Issue date Nov 3, 2020
- Samsung Electronics Co., Ltd.
- Kyeong-Hun Kim
- G01 - MEASURING TESTING
Information Patent Grant
Plasma processing apparatus and method of manufacturing semiconduct...
- Patent number 10,790,122
- Issue date Sep 29, 2020
- Samsung Electronics Co., Ltd.
- Jung-Pyo Hong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Calibrator of an optical emission spectroscopy
- Patent number 10,753,800
- Issue date Aug 25, 2020
- Samsung Electronics Co., Ltd.
- Jeong-Il Mun
- G01 - MEASURING TESTING
Information Patent Grant
Plasma monitoring apparatus, and plasma processing apparatus includ...
- Patent number 10,748,749
- Issue date Aug 18, 2020
- Samsung Electronics Co., Ltd.
- Jeong Il Mun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 10,395,900
- Issue date Aug 27, 2019
- Samsung Electronics Co., Ltd.
- Hak Young Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,062,550
- Issue date Aug 28, 2018
- Samsung Electronics Co., Ltd.
- Jung-Pyo Hong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for detecting defect of substrate
- Patent number 8,890,069
- Issue date Nov 18, 2014
- Samsung Electronics Co., Ltd.
- Jong-Cheon Sun
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for controlling ion beam
- Patent number 7,629,589
- Issue date Dec 8, 2009
- Samsung Electronics Co., Ltd.
- Sung-Wook Hwang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE INSPECTION METHOD
- Publication number 20240412943
- Publication date Dec 12, 2024
- Samsung Electronics Co., LTD
- Jinwoo Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF INSPECTING SEMICONDUCTOR DEVICE
- Publication number 20230266258
- Publication date Aug 24, 2023
- Samsung Electronics Co., Ltd.
- INHYE PARK
- G01 - MEASURING TESTING
Information Patent Application
PLASMA PROCESSING APPARATUS INCLUDING GAS DISTRIBUTION PLATE
- Publication number 20230033091
- Publication date Feb 2, 2023
- Samsung Electronics Co., Ltd.
- Chan Hoon Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF PROCESSING A SUBSTRATE
- Publication number 20210272838
- Publication date Sep 2, 2021
- Samsung Electronics Co., Ltd.
- Jong Woo SUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD, PLASMA PROCESSING APPARATUS AND METHOD OF...
- Publication number 20210202276
- Publication date Jul 1, 2021
- Samsung Electronics Co., Ltd.
- Seung-Yoon Song
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Loadlock Module and Semiconductor Manufacturing Apparatus Including...
- Publication number 20210202283
- Publication date Jul 1, 2021
- Samsung Electronics Co., Ltd.
- Kwang-nam Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND MANUFACTURING...
- Publication number 20210175110
- Publication date Jun 10, 2021
- Samsung Electronics Co., Ltd.
- Jung Mo SUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20200395196
- Publication date Dec 17, 2020
- Samsung Electronics Co., Ltd.
- JUNG-PYO HONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS INCLUDING EDGE RING
- Publication number 20200328105
- Publication date Oct 15, 2020
- SAMSUNG ELECTRONICS CO., LTD.
- Jong Woo SUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD, PLASMA PROCESSING APPARATUS AND METHOD OF...
- Publication number 20200227289
- Publication date Jul 16, 2020
- Samsung Electronics Co., Ltd.
- Seung-Yoon Song
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CONTROLLING UNIFORMITY OF PLASMA AND PLASMA PROCESSING SY...
- Publication number 20200227240
- Publication date Jul 16, 2020
- Samsung Electronics Co., Ltd.
- DONG-HYEON NA
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20200152427
- Publication date May 14, 2020
- Samsung Electronics Co., Ltd.
- Eun-Woo Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND MANUFACTURING...
- Publication number 20200135527
- Publication date Apr 30, 2020
- Samsung Electronics Co., Ltd.
- Jung Mo SUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR PROVIDING GAS TO A PLASMA CHAMBER AND A PLASMA PROCESSIN...
- Publication number 20200135433
- Publication date Apr 30, 2020
- Samsung Electronics Co., Ltd.
- HYUNG JUN KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA MONITORING APPARATUS AND PLASMA PROCESSING SYSTEM
- Publication number 20200066499
- Publication date Feb 27, 2020
- Samsung Electronics Co., Ltd.
- Kyeong-Hun KIM
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE SUPPORT APPARATUS AND PLASMA PROCESSING APPARATUS HAVING...
- Publication number 20200027705
- Publication date Jan 23, 2020
- Samsung Electronics Co., Ltd.
- Kwang-Nam KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Loadlock Module and Semiconductor Manufacturing Apparatus Including...
- Publication number 20200020555
- Publication date Jan 16, 2020
- Samsung Electronics Co., Ltd.
- Kwang-nam Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20190378693
- Publication date Dec 12, 2019
- Samsung Electronics Co., Ltd.
- Hak Young Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CALIBRATOR OF AN OPTICAL EMISSION SPECTROSCOPY
- Publication number 20190301937
- Publication date Oct 3, 2019
- Samsung Electronics Co., Ltd.
- Jeong-Il MUN
- G01 - MEASURING TESTING
Information Patent Application
PLASMA PROCESSING APPARATUS INCLUDING GAS DISTRIBUTION PLATE
- Publication number 20190304751
- Publication date Oct 3, 2019
- Samsung Electronics Co., Ltd.
- Chan Hoon Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20190148119
- Publication date May 16, 2019
- Samsung Electronics Co., Ltd.
- Jung-mo SUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20190074165
- Publication date Mar 7, 2019
- Samsung Electronics Co., Ltd.
- JUNG-PYO HONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Processing Apparatus
- Publication number 20170365444
- Publication date Dec 21, 2017
- Samsung Electronics Co., Ltd.
- Hak Young Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUS RING ASSEMBLY AND A METHOD OF PROCESSING A SUBSTRATE USING TH...
- Publication number 20170301578
- Publication date Oct 19, 2017
- Samsung Electronics Co., Ltd.
- Jung-Pyo HONG
- B08 - CLEANING
Information Patent Application
Substrate Processing Apparatus
- Publication number 20170062245
- Publication date Mar 2, 2017
- Samsung Electronics Co., Ltd.
- Jung-Pyo Hong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Etching Apparatus Using Inductively Coupled Plasma
- Publication number 20150359079
- Publication date Dec 10, 2015
- Samsung Electronics Co., Ltd.
- Jong-Woo Sun
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD FOR DETECTING DEFECT OF SUBSTRATE
- Publication number 20140306109
- Publication date Oct 16, 2014
- Samsung Electronics Co., Ltd.
- Jong-Cheon SUN
- G01 - MEASURING TESTING
Information Patent Application
APPARATUSES AND METHODS FOR EXTRACTING DEFECT DEPTH INFORMATION AND...
- Publication number 20140307052
- Publication date Oct 16, 2014
- Samsung Electronics Co., Ltd.
- Jeong-ho Ahn
- G02 - OPTICS
Information Patent Application
APPARATUS AND METHOD FOR ESTIMATING DEPTH OF BURIED DEFECT IN SUBST...
- Publication number 20140268170
- Publication date Sep 18, 2014
- Samsung Electronics Co., Ltd.
- Jong-Cheon Sun
- G01 - MEASURING TESTING
Information Patent Application
ELECTRONIC APPARATUS AND REMOTE CONTROL METHOD OF THE SAME
- Publication number 20100123546
- Publication date May 20, 2010
- Samsung Electronics Co., Ltd.
- Kyung-ho Seo
- G08 - SIGNALLING

Jong-Cheon SUN

Person

Patents Grantslast 30 patents

Substrate processing apparatus and method of processing a substrate

Substrate processing apparatus and method of processing a substrate

Plasma processing method, plasma processing apparatus and method of...

Plasma processing apparatus

Loadlock module and semiconductor manufacturing apparatus including...

Apparatus for manufacturing semiconductor device and manufacturing...

Plasma processing apparatus and method of manufacturing semiconduct...

Device for providing gas to a plasma chamber and a plasma processin...

Method of controlling uniformity of plasma and plasma processing sy...

Substrate support apparatus and plasma processing apparatus having...

Plasma processing method, plasma processing apparatus and method of...

Substrate processing apparatus including edge ring

Loadlock module and semiconductor manufacturing apparatus including...

Apparatus for manufacturing semiconductor device and manufacturing...

Plasma processing apparatus

Plasma monitoring apparatus and plasma processing system

Plasma processing apparatus and method of manufacturing semiconduct...

Calibrator of an optical emission spectroscopy

Plasma monitoring apparatus, and plasma processing apparatus includ...

Plasma processing apparatus

Substrate processing apparatus

Method for detecting defect of substrate

Apparatus and method for controlling ion beam

Patents Applicationslast 30 patents

SUBSTRATE INSPECTION METHOD

METHOD OF INSPECTING SEMICONDUCTOR DEVICE

PLASMA PROCESSING APPARATUS INCLUDING GAS DISTRIBUTION PLATE

SUBSTRATE PROCESSING APPARATUS AND METHOD OF PROCESSING A SUBSTRATE

PLASMA PROCESSING METHOD, PLASMA PROCESSING APPARATUS AND METHOD OF...

Loadlock Module and Semiconductor Manufacturing Apparatus Including...

APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND MANUFACTURING...

PLASMA PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS INCLUDING EDGE RING

PLASMA PROCESSING METHOD, PLASMA PROCESSING APPARATUS AND METHOD OF...

METHOD OF CONTROLLING UNIFORMITY OF PLASMA AND PLASMA PROCESSING SY...

PLASMA PROCESSING APPARATUS

APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND MANUFACTURING...

DEVICE FOR PROVIDING GAS TO A PLASMA CHAMBER AND A PLASMA PROCESSIN...

PLASMA MONITORING APPARATUS AND PLASMA PROCESSING SYSTEM

SUBSTRATE SUPPORT APPARATUS AND PLASMA PROCESSING APPARATUS HAVING...

Loadlock Module and Semiconductor Manufacturing Apparatus Including...

PLASMA PROCESSING APPARATUS

CALIBRATOR OF AN OPTICAL EMISSION SPECTROSCOPY

PLASMA PROCESSING APPARATUS INCLUDING GAS DISTRIBUTION PLATE

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCT...

Plasma Processing Apparatus

FOCUS RING ASSEMBLY AND A METHOD OF PROCESSING A SUBSTRATE USING TH...

Substrate Processing Apparatus

Etching Apparatus Using Inductively Coupled Plasma

METHOD FOR DETECTING DEFECT OF SUBSTRATE

APPARATUSES AND METHODS FOR EXTRACTING DEFECT DEPTH INFORMATION AND...

APPARATUS AND METHOD FOR ESTIMATING DEPTH OF BURIED DEFECT IN SUBST...

ELECTRONIC APPARATUS AND REMOTE CONTROL METHOD OF THE SAME