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last 30 patents
Information
Patent Grant
Method of test probe alignment control
Patent number
10,161,965
Issue date
Dec 25, 2018
Taiwan Semiconductor Manufacturing Company, Ltd.
Jui-Long Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for chemical mechanical polishing process control
Patent number
10,096,482
Issue date
Oct 9, 2018
Taiwan Semiconductor Manufacturing Company, Ltd.
Keung Hui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for tool condition monitoring based on a simulate...
Patent number
10,047,439
Issue date
Aug 14, 2018
Taiwan Semiconductor Manufacturing Company, Ltd.
Po-Feng Tsai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and/or system for chemical mechanical planarization (CMP)
Patent number
9,997,420
Issue date
Jun 12, 2018
Taiwan Semiconductor Manufacturing Company Limited
Yen-Di Tsen
B24 - GRINDING POLISHING
Information
Patent Grant
System and method for controlling ion implanter
Patent number
9,870,896
Issue date
Jan 16, 2018
Taiwan Semiconductor Manufacturing Co., Ltd
Po-Feng Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Qualitative fault detection and classification system for tool cond...
Patent number
9,727,049
Issue date
Aug 8, 2017
Taiwan Semiconductor Manufacturing Company, Ltd.
Chia-Tong Ho
G05 - CONTROLLING REGULATING
Information
Patent Grant
Real-time calibration for wafer processing chamber lamp modules
Patent number
9,698,065
Issue date
Jul 4, 2017
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Tien Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and associated methods for tuning processing tools
Patent number
9,519,285
Issue date
Dec 13, 2016
Taiwan Semiconductor Manufacturing Company, Ltd.
Po-Feng Tsai
G05 - CONTROLLING REGULATING
Information
Patent Grant
Dynamic compensation in advanced process control
Patent number
9,477,219
Issue date
Oct 25, 2016
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Wei Hsu
G05 - CONTROLLING REGULATING
Information
Patent Grant
Detection of defects on wafer during semiconductor fabrication
Patent number
9,466,101
Issue date
Oct 11, 2016
Taiwan Semiconductor Manufacturing Company Limited
Chun-Hsien Lin
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Scanner overlay correction system and method
Patent number
9,442,392
Issue date
Sep 13, 2016
Taiwan Semiconductor Manufacturing Co., Ltd.
Yen-Di Tsen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Integrated circuit manufacturing tool condition monitoring system a...
Patent number
9,349,660
Issue date
May 24, 2016
Taiwan Semiconductor Manufacturing Company, Ltd.
Po-Feng Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor fabrication component retuning
Patent number
9,323,244
Issue date
Apr 26, 2016
Taiwan Semiconductor Manufacturing Company Limited
Keung Hui
G05 - CONTROLLING REGULATING
Information
Patent Grant
Systems and methods of automatic boundary control for semiconductor...
Patent number
9,250,619
Issue date
Feb 2, 2016
Taiwan Semiconductor Manufacturing Co., Ltd.
Chih-Wei Hsu
G05 - CONTROLLING REGULATING
Information
Patent Grant
Systems and methods of automatically detecting failure patterns for...
Patent number
9,165,843
Issue date
Oct 20, 2015
Taiwan Semiconductor Manufacturing Co., Ltd.
Jui-Long Chen
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Semiconductor processing dispatch control
Patent number
9,158,301
Issue date
Oct 13, 2015
Taiwan Semiconductor Manufacturing Company, Ltd.
Sunny Wu
G05 - CONTROLLING REGULATING
Information
Patent Grant
2D/3D analysis for abnormal tools and stages diagnosis
Patent number
9,158,867
Issue date
Oct 13, 2015
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun-Hsien Lin
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Real-time calibration for wafer processing chamber lamp modules
Patent number
9,159,597
Issue date
Oct 13, 2015
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Tien Chang
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Adaptive and automatic determination of system parameters
Patent number
9,141,097
Issue date
Sep 22, 2015
Taiwan Semiconductor Manufacturing Company, Ltd.
Po-Feng Tsai
G05 - CONTROLLING REGULATING
Information
Patent Grant
Overlay abnormality gating by Z data
Patent number
9,123,583
Issue date
Sep 1, 2015
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun-Hsien Lin
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus and method for target thickness and surface profile unifo...
Patent number
9,102,033
Issue date
Aug 11, 2015
Taiwan Semiconductor Manufacturing Company, Ltd.
Keung Hui
B24 - GRINDING POLISHING
Information
Patent Grant
Scanner overlay correction system and method
Patent number
9,082,661
Issue date
Jul 14, 2015
Taiwan Semiconductor Manufacturing Co., Ltd.
Yen-Di Tsen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
APC model extension using existing APC models
Patent number
9,026,239
Issue date
May 5, 2015
Taiwan Semiconductor Manufacturing Company, Ltd.
Po-Feng Tsai
G05 - CONTROLLING REGULATING
Information
Patent Grant
Multi-zone temperature control for semiconductor wafer
Patent number
9,023,664
Issue date
May 5, 2015
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun-Lin Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of test probe alignment control
Patent number
9,000,798
Issue date
Apr 7, 2015
Taiwan Semiconductor Manufacturing Company, Ltd.
Jui-Long Chen
G01 - MEASURING TESTING
Information
Patent Grant
Systems and methods of automatically detecting failure patterns for...
Patent number
8,938,698
Issue date
Jan 20, 2015
Taiwan Semiconductor Manufacturing Co., Ltd.
Jui-Long Chen
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
System and method of dosage profile control
Patent number
8,925,479
Issue date
Jan 6, 2015
Taiwan Semiconductor Manufacturing Company, Ltd.
Keung Hui
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Scanner overlay correction system and method
Patent number
8,889,434
Issue date
Nov 18, 2014
Taiwan Semiconductor Manufacturing Co., Ltd.
Yen-Di Tsen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of optimizing design for manufacturing (DFM)
Patent number
8,793,638
Issue date
Jul 29, 2014
Taiwan Semiconductor Manufacturing Company, Ltd.
Keuing Hui
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Semiconductor processing dispatch control
Patent number
8,781,614
Issue date
Jul 15, 2014
Taiwan Semiconductor Manufacturing Company, Ltd.
Sunny Wu
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
Information
Patent Application
MULTI-ZONE TEMPERATURE CONTROL FOR SEMICONDUCTOR WAFER
Publication number
20170022611
Publication date
Jan 26, 2017
Taiwan Semiconductor Manufacturing Co., LTD
Chun-Lin CHANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Real-Time Calibration for Wafer Processing Chamber Lamp Modules
Publication number
20160027708
Publication date
Jan 28, 2016
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Tien Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus and Method for Chemical Mechanical Polishing Process Control
Publication number
20150348797
Publication date
Dec 3, 2015
Taiwan Semiconductor Manufacturing Company, Ltd.
Keung Hui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-ZONE TEMPERATURE CONTROL FOR SEMICONDUCTOR WAFER
Publication number
20150211122
Publication date
Jul 30, 2015
Taiwan Semiconductor Manufacturing Co., LTD
Chun-Lin CHANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of Test Probe Alignment Control
Publication number
20150192616
Publication date
Jul 9, 2015
Taiwan Semiconductor Manufacturing Company, Ltd.
Jui-Long Chen
G01 - MEASURING TESTING
Information
Patent Application
METHOD AND/OR SYSTEM FOR CHEMICAL MECHANICAL PLANARIZATION (CMP)
Publication number
20150187662
Publication date
Jul 2, 2015
Taiwan Semiconductor Manufacturing Company Limited
Yen-Di Tsen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SCANNER OVERLAY CORRECTION SYSTEM AND METHOD
Publication number
20150170904
Publication date
Jun 18, 2015
Taiwan Semiconductor Manufacturing Co., LTD
Yen-Di TSEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR CONTROLLING ION IMPLANTER
Publication number
20150162166
Publication date
Jun 11, 2015
Taiwan Semiconductor Manufacturing Co., Ltd.
Po-Feng TSAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS OF AUTOMATICALLY DETECTING FAILURE PATTERNS FOR...
Publication number
20150125970
Publication date
May 7, 2015
Taiwan Semiconductor Manufacturing Co., LTD
Jui-Long CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR FABRICATION COMPONENT RETUNING
Publication number
20150081081
Publication date
Mar 19, 2015
Taiwan Semiconductor Manufacturing Company Limited
Keung Hui
G05 - CONTROLLING REGULATING
Information
Patent Application
SCANNER OVERLAY CORRECTION SYSTEM AND METHOD
Publication number
20150027636
Publication date
Jan 29, 2015
Taiwan Semiconductor Manufacturing Co., LTD
Yen-Di TSEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Overlay Abnormality Gating by Z Data
Publication number
20150015870
Publication date
Jan 15, 2015
Taiwan Semiconductor Manufacturing Co., LTD
Chun-Hsien Lin
G01 - MEASURING TESTING
Information
Patent Application
DETECTION OF DEFECTS ON WAFER DURING SEMICONDUCTOR FABRICATION
Publication number
20140328534
Publication date
Nov 6, 2014
Taiwan Semiconductor Manufacturing Company Limited
CHUN-HSIEN LIN
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Semiconductor Processing Dispatch Control
Publication number
20140303765
Publication date
Oct 9, 2014
Sunny Wu
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Application
TOOL OPTIMIZING TUNING SYSTEMS AND ASSOCIATED METHODS
Publication number
20140207271
Publication date
Jul 24, 2014
Taiwan Semiconductor Manufacturing Company, Ltd.
Po-Feng Tsai
G05 - CONTROLLING REGULATING
Information
Patent Application
SCANNER OVERLAY CORRECTION SYSTEM AND METHOD
Publication number
20140170782
Publication date
Jun 19, 2014
Taiwan Semiconductor Manufacturing Co., LTD
Yen-Di TSEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS OF AUTOMATICALLY DETECTING FAILURE PATTERNS FOR...
Publication number
20140106474
Publication date
Apr 17, 2014
Taiwan Semiconductor Manufacturing Co., LTD
Jui-Long CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
2D/3D Analysis for Abnormal Tools and Stages Diagnosis
Publication number
20140100684
Publication date
Apr 10, 2014
Taiwan Semiconductor Manufacturing Co. Ltd.
Chun-Hsien Lin
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
ADAPTIVE AND AUTOMATIC DETERMINATION OF SYSTEM PARAMETERS
Publication number
20140074258
Publication date
Mar 13, 2014
Taiwan Semiconductor Manufacturing Company, Ltd.
Po-Feng TSAI
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Application
QUALITATIVE FAULT DETECTION AND CLASSIFICATION SYSTEM FOR TOOL COND...
Publication number
20140067324
Publication date
Mar 6, 2014
Taiwan Semiconductor Manufacturing Company, Ltd.
Chia-Tong Ho
G05 - CONTROLLING REGULATING
Information
Patent Application
Method of Optimizing Design for Manufacturing (DFM)
Publication number
20140033159
Publication date
Jan 30, 2014
Taiwan Semiconductor Manufacturing Company, Ltd.
Keuing Hui
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD OF TEST PROBE ALIGNMENT CONTROL
Publication number
20130335109
Publication date
Dec 19, 2013
Taiwan Semiconductor Manufacturing Company, Ltd.
Jui-Long Chen
G01 - MEASURING TESTING
Information
Patent Application
REAL-TIME CALIBRATION FOR WAFER PROCESSING CHAMBER LAMP MODULES
Publication number
20130306621
Publication date
Nov 21, 2013
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Tien Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS OF AUTOMATICALLY DETECTING FAILURE PATTERNS FOR...
Publication number
20130288403
Publication date
Oct 31, 2013
Taiwan Semiconductor Manufacturing Co., LTD
Jui-Long CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-ZONE TEMPERATURE CONTROL FOR SEMICONDUCTOR WAFER
Publication number
20130171746
Publication date
Jul 4, 2013
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Chun-Lin Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR TOOL CONDITION MONITORING
Publication number
20130150997
Publication date
Jun 13, 2013
Taiwan Semiconductor Manufacturing Company, Ltd.
Po-Feng Tsai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SYSTEMS AND METHODS OF AUTOMATIC BOUNDARY CONTROL FOR SEMICONDUCTOR...
Publication number
20130144423
Publication date
Jun 6, 2013
TAIWAN SEMICONDUCTOR MANUFACTURING, CO., LTD.
Chih-Wei HSU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTEGRATED CIRCUIT MANUFACTURING TOOL CONDITION MONITORING SYSTEM A...
Publication number
20130144419
Publication date
Jun 6, 2013
Taiwan Semiconductor Manufacturing Company, Ltd.
Po-Feng Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System and Method of Dosage Profile Control
Publication number
20130068162
Publication date
Mar 21, 2013
Taiwan Semiconductor Manufacturing Company, Ltd.
Keung Hui
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Semiconductor Processing Dispatch Control
Publication number
20130013097
Publication date
Jan 10, 2013
Taiwan Semiconductor Manufacturing Company, Ltd.
Sunny Wu
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...