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Yongin-City, KR
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Patents Grants
last 30 patents
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Patent Grant
Substrate processing apparatus and method of operating the same
Patent number
9,108,296
Issue date
Aug 18, 2015
Samsung Display Co., Ltd.
Jong Kwang Whang
B24 - GRINDING POLISHING
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last 30 patents
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Patent Application
Substrate processing apparatus and method of operating the same
Publication number
20120282845
Publication date
Nov 8, 2012
Jong Kwang Whang
B24 - GRINDING POLISHING