Jong Won Yun

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Cheongju-si, KR

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, linked processing system, and subst...
- Patent number 11,784,057
- Issue date Oct 10, 2023
- Tokyo Electron Limited
- Jong Won Yun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and rec...
- Patent number 11,282,719
- Issue date Mar 22, 2022
- Tokyo Electron Limited
- Go Ayabe
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, LINKED PROCESSING SYSTEM, AND SUBST...
- Publication number 20210090895
- Publication date Mar 25, 2021
- TOKYO ELECTRON LIMITED
- Jong Won Yun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
- Publication number 20190304811
- Publication date Oct 3, 2019
- TOKYO ELECTRON LIMITED
- Go Ayabe
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, LINKED PROCESSING SYSTEM, AND SUBST...
- Publication number 20160111296
- Publication date Apr 21, 2016
- TOKYO ELECTRON LIMITED
- Jong Won Yun
- H01 - BASIC ELECTRIC ELEMENTS