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Jung-ku, KR
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last 30 patents
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Patent Grant
Dry-etching gas for semiconductor process and preparation method th...
Patent number
7,319,174
Issue date
Jan 15, 2008
Ulsan Chemical Co., Ltd.
Hae Seok Ji
C07 - ORGANIC CHEMISTRY
Patents Applications
last 30 patents
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Patent Application
DRY-ETCHING GAS FOR SEMICONDUCTOR PROCESS
Publication number
20080203353
Publication date
Aug 28, 2008
ULSAN CHEMICAL Co., Ltd.
Hae Seok JI
C07 - ORGANIC CHEMISTRY
Information
Patent Application
DRY-ETCHING GAS FOR SEMICONDUCTOR PROCESS AND PREPARATION METHOD TH...
Publication number
20070265478
Publication date
Nov 15, 2007
ULSAN CHEMICAL Co., Ltd.
Hae Seok JI
C07 - ORGANIC CHEMISTRY