TREA

Jong-Yuh Chang

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  • Jhubei City, TW
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Patents Grantslast 30 patents

  • Information Patent Grant

    Pellicle having vent hole
    • Patent number 12,013,632
    • Issue date Jun 18, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd
    • Chue San Yoo
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Method for extreme ultraviolet lithography mask treatment
    • Patent number 11,906,897
    • Issue date Feb 20, 2024
    • Taiwan Semiconductor Manufacturing Co., Ltd
    • Pei-Cheng Hsu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Pellicle removal method
    • Patent number 11,143,952
    • Issue date Oct 12, 2021
    • Taiwan Semiconductor Manufacturing Company, Ltd
    • Chue San Yoo
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Method for extreme ultraviolet lithography mask treatment
    • Patent number 11,048,158
    • Issue date Jun 29, 2021
    • Taiwan Semiconductor Manufacturing Co., Ltd
    • Pei-Cheng Hsu
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Extreme ultraviolet alignment marks
    • Patent number 10,859,906
    • Issue date Dec 8, 2020
    • Taiwan Semiconductor Manufacturing Company Limited
    • Yi-Fu Hsieh
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Extreme ultraviolet alignment marks
    • Patent number 10,345,695
    • Issue date Jul 9, 2019
    • Taiwan Semiconductor Manufacturing Co., Ltd
    • Yi-Fu Hsieh
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Image mask film scheme and method
    • Patent number 10,156,783
    • Issue date Dec 18, 2018
    • Taiwan Semiconductor Manufactuing Company, Ltd.
    • Chih-Chiang Tu
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Moveable and adjustable gas injectors for an etching chamber
    • Patent number 10,157,805
    • Issue date Dec 18, 2018
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Tzung-Shiun Lu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Graphene pellicle for extreme ultraviolet lithography
    • Patent number 10,012,899
    • Issue date Jul 3, 2018
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Chih-Chiang Tu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Systems and methods eliminating false defect detections
    • Patent number 9,689,805
    • Issue date Jun 27, 2017
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Biow-Hiem Ong
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Image mask film scheme and method
    • Patent number 9,581,894
    • Issue date Feb 28, 2017
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chih-Chiang Tu
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Image process method to improve mask inspection performance
    • Patent number 9,529,255
    • Issue date Dec 27, 2016
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Meng-Lin Lu
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Mask overlay control
    • Patent number 9,377,701
    • Issue date Jun 28, 2016
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Chih-Chiang Tu
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Moveable and adjustable gas injectors for an etching chamber
    • Patent number 9,373,551
    • Issue date Jun 21, 2016
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Tzung-Shiun Lu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Image mask film scheme and method
    • Patent number 9,122,175
    • Issue date Sep 1, 2015
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chih-Chiang Tu
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Systems and methods eliminating false defect detections
    • Patent number 9,063,097
    • Issue date Jun 23, 2015
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Biow-Hiem Ong
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Systems and methods for lithography masks
    • Patent number 9,057,961
    • Issue date Jun 16, 2015
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chih-Chiang Tu
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Mask overlay control
    • Patent number 9,017,903
    • Issue date Apr 28, 2015
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Chih-Chiang Tu
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Mask blank for scattering effect reduction
    • Patent number 8,999,611
    • Issue date Apr 7, 2015
    • Taiwan Semiconductor Manufacturing Co. Ltd.
    • Chih-Chiang Tu
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Rendered database image-to-inspection image optimization for inspec...
    • Patent number 8,818,072
    • Issue date Aug 26, 2014
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Biow-Hiem Ong
    • G06 - COMPUTING CALCULATING COUNTING
  • Information Patent Grant

    Method and pellicle mounting apparatus for reducing pellicle induce...
    • Patent number 8,792,078
    • Issue date Jul 29, 2014
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Cheng-Ming Lin
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Systems and methods for lithography masks
    • Patent number 8,785,083
    • Issue date Jul 22, 2014
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chih-Chiang Tu
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Contamination inspection
    • Patent number 8,629,407
    • Issue date Jan 14, 2014
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chien-Hung Lai
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    PELLICLE HAVING VENT HOLE
    • Publication number 20240329517
    • Publication date Oct 3, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chue San YOO
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PELLICLE HAVING VENT HOLE
    • Publication number 20220026797
    • Publication date Jan 27, 2022
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chue San YOO
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Method for Extreme Ultraviolet Lithography Mask Treatment
    • Publication number 20210311383
    • Publication date Oct 7, 2021
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Pei-Cheng Hsu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    EXTREME ULTRAVIOLET ALIGNMENT MARKS
    • Publication number 20190332004
    • Publication date Oct 31, 2019
    • Taiwan Semiconductor Manufacturing Company Limited
    • Yi-Fu HSIEH
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Method for Extreme Ultraviolet Lithography Mask Treatment
    • Publication number 20190324364
    • Publication date Oct 24, 2019
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Pei-Cheng Hsu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PELLICLE REMOVAL METHOD
    • Publication number 20190094683
    • Publication date Mar 28, 2019
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chue San YOO
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    EXTREME ULTRAVIOLET ALIGNMENT MARKS
    • Publication number 20180149963
    • Publication date May 31, 2018
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Yi-Fu HSIEH
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Graphene Pellicle for Extreme Ultraviolet Lithography
    • Publication number 20180059534
    • Publication date Mar 1, 2018
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Chih-Chiang Tu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Image Mask Film Scheme and Method
    • Publication number 20170168387
    • Publication date Jun 15, 2017
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chih-Chiang Tu
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    MOVEABLE AND ADJUSTABLE GAS INJECTORS FOR AN ETCHING CHAMBER
    • Publication number 20160284616
    • Publication date Sep 29, 2016
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Tzung-Shiun LU
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Image Mask Film Scheme and Method
    • Publication number 20150370158
    • Publication date Dec 24, 2015
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chih-Chiang Tu
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Systems and Methods Eliminating False Defect Detections
    • Publication number 20150316489
    • Publication date Nov 5, 2015
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Biow-Hiem Ong
    • G01 - MEASURING TESTING
  • Information Patent Application

    MASK OVERLAY CONTROL
    • Publication number 20150227038
    • Publication date Aug 13, 2015
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Chih-Chiang Tu
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Image Process Method to Improve Mask Inspection Performance
    • Publication number 20150154326
    • Publication date Jun 4, 2015
    • Taiwan Semiconductor Manufacturing Co.,Ltd
    • Meng-Lin Lu
    • G06 - COMPUTING CALCULATING COUNTING
  • Information Patent Application

    MASK OVERLAY CONTROL
    • Publication number 20150024306
    • Publication date Jan 22, 2015
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Chih-Chiang Tu
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Systems and Methods for Lithography Masks
    • Publication number 20140335446
    • Publication date Nov 13, 2014
    • Chih-Chiang Tu
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    MOVEABLE AND ADJUSTABLE GAS INJECTORS FOR AN ETCHING CHAMBER
    • Publication number 20140273301
    • Publication date Sep 18, 2014
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Tzung-Shiun LU
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Mask Blank for Scattering Effect Reduction
    • Publication number 20140255825
    • Publication date Sep 11, 2014
    • Taiwan Semiconductor Manufacturing Co. Ltd.
    • Chih-Chiang Tu
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Image Mask Film Scheme and Method
    • Publication number 20140106262
    • Publication date Apr 17, 2014
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chih-Chiang Tu
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Systems and Methods for Lithography Masks
    • Publication number 20130323625
    • Publication date Dec 5, 2013
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chih-Chiang Tu
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    CONTAMINATION INSPECTION
    • Publication number 20120261563
    • Publication date Oct 18, 2012
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chien-Hung Lai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Systems and Methods Eliminating False Defect Detections
    • Publication number 20120207381
    • Publication date Aug 16, 2012
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Biow-Hiem Ong
    • G01 - MEASURING TESTING
  • Information Patent Application

    RENDERED DATABASE IMAGE-TO-INSPECTION IMAGE OPTIMIZATION FOR INSPEC...
    • Publication number 20120051621
    • Publication date Mar 1, 2012
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Biow-Hiem Ong
    • G06 - COMPUTING CALCULATING COUNTING
  • Information Patent Application

    METHOD AND PELLICLE MOUNTING APPARATUS FOR REDUCING PELLICLE INDUCE...
    • Publication number 20100271612
    • Publication date Oct 28, 2010
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Cheng-Ming LIN
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    MASK BLANK, MASK FORMED FROM THE BLANK, AND METHOD OF FORMING A MASK
    • Publication number 20100119958
    • Publication date May 13, 2010
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Chue San YOO
    • B82 - NANO-TECHNOLOGY
  • Information Patent Application

    Novel organic remover for advanced reticle contamination cleaning
    • Publication number 20070066071
    • Publication date Mar 22, 2007
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chia-Hsien Chen
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY