Jonghoon Baek

Person

San Diego, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Cleaning a structure surface in an EUV chamber
- Patent number 12,189,313
- Issue date Jan 7, 2025
- ASML Netherlands B.V.
- Chunguang Xia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning a structure surface in an EUV chamber
- Patent number 11,347,154
- Issue date May 31, 2022
- ASML Netherlands B.V.
- Chunguang Xia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System, method and apparatus for target material debris cleaning of...
- Patent number 11,013,096
- Issue date May 18, 2021
- ASML Nettherlands B.V.
- Jonghoon Baek
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System, method and apparatus for target material debris cleaning of...
- Patent number 10,477,662
- Issue date Nov 12, 2019
- ASML Netherlands B.V.
- Jonghoon Baek
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System, method and apparatus for target material debris cleaning of...
- Patent number 10,362,664
- Issue date Jul 23, 2019
- ASML Netherlands B.V.
- Jonghoon Baek
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System, method and apparatus for target material debris cleaning of...
- Patent number 9,888,554
- Issue date Feb 6, 2018
- ASML Netherlands B.V.
- Jonghoon Baek
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Tightly fitted ceramic insulator on large area electrode
- Patent number 9,827,578
- Issue date Nov 28, 2017
- Applied Materials, Inc.
- Jozef Kudela
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CLEANING A STRUCTURE SURFACE IN AN EUV CHAMBER
- Publication number 20220179328
- Publication date Jun 9, 2022
- ASML NETHERLANDS B.V.
- Chunguang Xia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING A STRUCTURE SURFACE IN AN EUV CHAMBER
- Publication number 20210063899
- Publication date Mar 4, 2021
- Chunguang Xia
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM, METHOD AND APPARATUS FOR TARGET MATERIAL DEBRIS CLEANING OF...
- Publication number 20200037428
- Publication date Jan 30, 2020
- ASML NETHERLANDS B.V.
- Jonghoon Baek
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM, METHOD AND APPARATUS FOR TARGET MATERIAL DEBRIS CLEANING OF...
- Publication number 20190289704
- Publication date Sep 19, 2019
- ASML NETHERLANDS B.V.
- Jonghoon Baek
- G02 - OPTICS
Information Patent Application
System, Method and Apparatus for Target Material Debris Cleaning of...
- Publication number 20180160517
- Publication date Jun 7, 2018
- ASML NETHERLANDS B.V.
- Jonghoon Baek
- G02 - OPTICS
Information Patent Application
System, Method and Apparatus for Target Material Debris Cleaning of...
- Publication number 20170215265
- Publication date Jul 27, 2017
- ASML NETHERLANDS B.V.
- Jonghoon Baek
- G02 - OPTICS

Jonghoon Baek

Person

Patents Grantslast 30 patents

Cleaning a structure surface in an EUV chamber

Cleaning a structure surface in an EUV chamber

System, method and apparatus for target material debris cleaning of...

System, method and apparatus for target material debris cleaning of...

System, method and apparatus for target material debris cleaning of...

System, method and apparatus for target material debris cleaning of...

Tightly fitted ceramic insulator on large area electrode

Patents Applicationslast 30 patents

CLEANING A STRUCTURE SURFACE IN AN EUV CHAMBER

CLEANING A STRUCTURE SURFACE IN AN EUV CHAMBER

SYSTEM, METHOD AND APPARATUS FOR TARGET MATERIAL DEBRIS CLEANING OF...

SYSTEM, METHOD AND APPARATUS FOR TARGET MATERIAL DEBRIS CLEANING OF...

System, Method and Apparatus for Target Material Debris Cleaning of...

System, Method and Apparatus for Target Material Debris Cleaning of...