Jonghun PI

Person

Gunwi-gun, KR

People

Patents Grantslast 30 patents

Information Patent Grant
System of semiconductor process and control method thereof
- Patent number 12,125,687
- Issue date Oct 22, 2024
- Samsung Electronics Co., Ltd.
- Youngdo Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of cleaning collector of EUV light source system
- Patent number 11,940,620
- Issue date Mar 26, 2024
- Samsung Electronics Co., Ltd.
- Changsoon Lim
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTATE PROCESSING METHOD USING TH...
- Publication number 20250218752
- Publication date Jul 3, 2025
- Samsung Electronics Co., Ltd.
- Sejin Oh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ARCING DETECTION SENSOR AND PLASMA TREATING APPARATUS INCLUDING THE...
- Publication number 20250201541
- Publication date Jun 19, 2025
- Samsung Electronics Co., Ltd.
- Dohoon Kwon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR MEASURING RADICAL DENSITY DISTRIBUTION BASED ON LIGHT...
- Publication number 20240159657
- Publication date May 16, 2024
- Samsung Electronics Co., Ltd.
- Sejin OH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESS DEVICE
- Publication number 20240047247
- Publication date Feb 8, 2024
- Samsung Electronics Co., Ltd.
- Chansoo KANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR ARCING DIAGNOSIS, PLASMA PROCESS EQUIPMENT INCLUDING...
- Publication number 20230109672
- Publication date Apr 13, 2023
- Samsung Electronics Co., Ltd.
- Changsoon Lim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SLURRY SUPPLY DEVICE, SUBSTRATE POLISHING APPARATUS, AND SUBSTRATE...
- Publication number 20230096455
- Publication date Mar 30, 2023
- Samsung Electronics Co., Ltd.
- SEUNGCHUL LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM OF SEMICONDUCTOR PROCESS AND CONTROL METHOD THEREOF
- Publication number 20230005723
- Publication date Jan 5, 2023
- Samsung Electronics Co., Ltd.
- YOUNGDO KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CLEANING COLLECTOR OF EUV LIGHT SOURCE SYSTEM
- Publication number 20220308339
- Publication date Sep 29, 2022
- Samsung Electronics Co., Ltd.
- Changsoon LIM
- B08 - CLEANING

Person

Patents Grantslast 30 patents

System of semiconductor process and control method thereof

Method of cleaning collector of EUV light source system

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, SUBSTATE PROCESSING METHOD USING TH...

ARCING DETECTION SENSOR AND PLASMA TREATING APPARATUS INCLUDING THE...

APPARATUS FOR MEASURING RADICAL DENSITY DISTRIBUTION BASED ON LIGHT...

SEMICONDUCTOR PROCESS DEVICE

APPARATUS FOR ARCING DIAGNOSIS, PLASMA PROCESS EQUIPMENT INCLUDING...

SLURRY SUPPLY DEVICE, SUBSTRATE POLISHING APPARATUS, AND SUBSTRATE...

SYSTEM OF SEMICONDUCTOR PROCESS AND CONTROL METHOD THEREOF

METHOD OF CLEANING COLLECTOR OF EUV LIGHT SOURCE SYSTEM