Membership
Tour
Register
Log in
Jonghun PI
Follow
Person
Gunwi-gun, KR
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Method of cleaning collector of EUV light source system
Patent number
11,940,620
Issue date
Mar 26, 2024
Samsung Electronics Co., Ltd.
Changsoon Lim
B08 - CLEANING
Patents Applications
last 30 patents
Information
Patent Application
SEMICONDUCTOR PROCESS DEVICE
Publication number
20240047247
Publication date
Feb 8, 2024
Samsung Electronics Co., Ltd.
Chansoo KANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR ARCING DIAGNOSIS, PLASMA PROCESS EQUIPMENT INCLUDING...
Publication number
20230109672
Publication date
Apr 13, 2023
Samsung Electronics Co., Ltd.
Changsoon Lim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SLURRY SUPPLY DEVICE, SUBSTRATE POLISHING APPARATUS, AND SUBSTRATE...
Publication number
20230096455
Publication date
Mar 30, 2023
Samsung Electronics Co., Ltd.
SEUNGCHUL LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM OF SEMICONDUCTOR PROCESS AND CONTROL METHOD THEREOF
Publication number
20230005723
Publication date
Jan 5, 2023
Samsung Electronics Co., Ltd.
YOUNGDO KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF CLEANING COLLECTOR OF EUV LIGHT SOURCE SYSTEM
Publication number
20220308339
Publication date
Sep 29, 2022
Samsung Electronics Co., Ltd.
Changsoon LIM
B08 - CLEANING