Jonghwi Seo

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Suwon-si, KR

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Patents Grantslast 30 patents

Information Patent Grant
Wafer processing apparatus including EFEM and method of processing...
- Patent number 12,217,984
- Issue date Feb 4, 2025
- Samsung Electronics Co., Ltd.
- Jinhyuk Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer processing apparatus including equipment front end module (EF...
- Patent number 11,804,393
- Issue date Oct 31, 2023
- Samsung Electronics Co., Ltd.
- Jinhyuk Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing apparatus including a beam shaper for s...
- Patent number 11,462,410
- Issue date Oct 4, 2022
- Samsung Electronics Co., Ltd.
- Nohsung Kwak
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
WAFER PROCESSING APPARATUS INCLUDING EFEM AND METHOD OF PROCESSING...
- Publication number 20230080991
- Publication date Mar 16, 2023
- Samsung Electronics Co., Ltd.
- Jinhyuk Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PROCESSING APPARATUS INCLUDING EQUIPMENT FRONT END MODULE (EF...
- Publication number 20230072147
- Publication date Mar 9, 2023
- Samsung Electronics Co., Ltd.
- Jinhyuk Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS INCLUDING A BEAM SHAPER FOR S...
- Publication number 20210082704
- Publication date Mar 18, 2021
- Samsung Electronics Co., Ltd.
- Nohsung Kwak
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR