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Asan-si, KR
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Patents Grants
last 30 patents
Information
Patent Grant
Fluid supply unit and substrate treating apparatus having the same
Patent number
11,794,220
Issue date
Oct 24, 2023
Semes Co., Ltd.
Inhwang Park
B08 - CLEANING
Information
Patent Grant
Substrate support unit and substrate treating apparatus having the...
Patent number
11,721,575
Issue date
Aug 8, 2023
Semes Co., Ltd.
Inhwang Park
B08 - CLEANING
Information
Patent Grant
Standby port and substrate processing apparatus having the same
Patent number
10,825,699
Issue date
Nov 3, 2020
Semes Co., Ltd.
Buyoung Jung
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
FLUID SUPPLY UNIT AND SUBSTRATE TREATING APPARATUS HAVING THE SAME
Publication number
20210008606
Publication date
Jan 14, 2021
SEMES CO., LTD.
Inhwang PARK
B08 - CLEANING
Information
Patent Application
SUBSTRATE SUPPORT UNIT AND SUBSTRATE TREATING APPARATUS HAVING THE...
Publication number
20200402836
Publication date
Dec 24, 2020
SEMES CO., LTD.
Inhwang PARK
B08 - CLEANING
Information
Patent Application
STANDBY PORT AND SUBSTRATE PROCESSING APPARATUS HAVING THE SAME
Publication number
20190189471
Publication date
Jun 20, 2019
SEMES CO., LTD.
BUYOUNG JUNG
H01 - BASIC ELECTRIC ELEMENTS