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Jongjin Kim
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San Jose, CA, US
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last 30 patents
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Patent Grant
Laser produced plasma illuminator with low atomic number cryogenic...
Patent number
11,272,607
Issue date
Mar 8, 2022
KLA Corporation
Chao Chang
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Laser produced plasma illuminator with liquid sheet jet target
Patent number
11,259,394
Issue date
Feb 22, 2022
KLA Corporation
Chao Chang
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
SPECTRAL ANGULAR METROLOGY
Publication number
20250076208
Publication date
Mar 6, 2025
KLA Corporation
Amnon Manassen
G01 - MEASURING TESTING
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Patent Application
DUAL FREQUENCY COMB IMAGING SPECTROSCOPIC ELLIPSOMETER
Publication number
20250052666
Publication date
Feb 13, 2025
KLA Corporation
Chao Chang
G01 - MEASURING TESTING
Information
Patent Application
Laser Produced Plasma Illuminator With Low Atomic Number Cryogenic...
Publication number
20210136902
Publication date
May 6, 2021
KLA Corporation
Chao Chang
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Laser Produced Plasma Illuminator With Liquid Sheet Jet Target
Publication number
20210136901
Publication date
May 6, 2021
KLA Corporation
Chao Chang
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR