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Jongjin Kim
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San Jose, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Laser produced plasma illuminator with low atomic number cryogenic...
Patent number
11,272,607
Issue date
Mar 8, 2022
KLA Corporation
Chao Chang
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Laser produced plasma illuminator with liquid sheet jet target
Patent number
11,259,394
Issue date
Feb 22, 2022
KLA Corporation
Chao Chang
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
Laser Produced Plasma Illuminator With Low Atomic Number Cryogenic...
Publication number
20210136902
Publication date
May 6, 2021
KLA Corporation
Chao Chang
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Laser Produced Plasma Illuminator With Liquid Sheet Jet Target
Publication number
20210136901
Publication date
May 6, 2021
KLA Corporation
Chao Chang
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR