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Seoul, KR
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Patents Grants
last 30 patents
Information
Patent Grant
Reticle in an apparatus for extreme ultraviolet exposure
Patent number
11,409,193
Issue date
Aug 9, 2022
Samsung Electronics Co., Ltd.
Mankyu Kang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF MANUFACTURING PHOTOMASK, AND METHOD OF MANUFACTURING SEMI...
Publication number
20230408912
Publication date
Dec 21, 2023
Samsung Electronics Co., Ltd.
Jongkeun OH
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CORRECTING APPARATUS OF EXTREME ULTRAVIOLET (EUV) PHOTOMASK AND COR...
Publication number
20220283512
Publication date
Sep 8, 2022
Samsung Electronics Co., Ltd.
Sanguk PARK
G02 - OPTICS
Information
Patent Application
METHOD OF MANUFACTURING EXTREME ULTRAVIOLET (EUV) PHOTOMASK AND MET...
Publication number
20220113619
Publication date
Apr 14, 2022
Samsung Electronics Co., Ltd.
Jongkeun OH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RETICLE IN AN APPARATUS FOR EXTREME ULTRAVIOLET EXPOSURE
Publication number
20210302825
Publication date
Sep 30, 2021
Samsung Electronics Co., Ltd.
Mankyu KANG
H01 - BASIC ELECTRIC ELEMENTS