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Joo-Yun Lee
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San Leandro, CA, US
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last 30 patents
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Patent Grant
Composition for cleaning chemical mechanical planarization apparatus
Patent number
6,852,682
Issue date
Feb 8, 2005
EKC Technology, Inc.
Robert J. Small
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
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Patent Grant
Composition for cleaning chemical mechanical planarization apparatus
Patent number
6,498,131
Issue date
Dec 24, 2002
EKC Technology, Inc.
Robert J. Small
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Patents Applications
last 30 patents
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Patent Application
Composition for cleaning chemical mechanical planarization apparatus
Publication number
20030073601
Publication date
Apr 17, 2003
Robert J. Small
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...