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Joost Van Groen
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Utrecht, NL
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last 30 patents
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Patent Grant
Method for sensing wafers located inside a closed wafer cassette
Patent number
7,202,491
Issue date
Apr 10, 2007
ASM International N.V.
Adriaan Garssen
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
Method and apparatus for mapping of wafers located inside a closed...
Publication number
20050035313
Publication date
Feb 17, 2005
Adriaan Garssen
G01 - MEASURING TESTING