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San Diego, CA, US
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last 30 patents
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Patent Grant
Extreme ultraviolet light source utilizing a target of finite extent
Patent number
9,826,616
Issue date
Nov 21, 2017
ASML Netherlands B.V.
Yezheng Tao
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light source
Patent number
9,357,625
Issue date
May 31, 2016
ASML Netherlands B.V.
Yezheng Tao
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE
Publication number
20180124906
Publication date
May 3, 2018
ASML NETHERLANDS B.V.
Yezheng Tao
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE
Publication number
20160255708
Publication date
Sep 1, 2016
ASML NETHERLANDS B.V.
Yezheng Tao
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE
Publication number
20160007434
Publication date
Jan 7, 2016
ASML NETHERLANDS B.V.
Yezheng Tao
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR