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Jordan Pio
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Portland, OR, US
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last 30 patents
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Patent Grant
Fault discrimination and calibration of scatterometry overlay targets
Patent number
10,527,952
Issue date
Jan 7, 2020
KLA-Tencor Corporation
Tzahi Grunzweig
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Fault Discrimination and Calibration of Scatterometry Overlay Targets
Publication number
20180373167
Publication date
Dec 27, 2018
KLA-Tencor Corporation
Tzahi Grunzweig
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY