Jorge P. Fernandez

Follow

Person

San Mateo, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
In-situ probe for optimizing electron beam inspection and metrology...
- Patent number 6,664,546
- Issue date Dec 16, 2003
- KLA Tencor
- Mark A. McCord
- H01 - BASIC ELECTRIC ELEMENTS