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Jose Tong Sam
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Fremont, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Gas distribution system having fast gas switching capabilities
Patent number
8,673,785
Issue date
Mar 18, 2014
Lam Research Corporation
Zhisong Huang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Fast gas switching plasma processing apparatus
Patent number
8,343,876
Issue date
Jan 1, 2013
Lam Research Corporation
S. M. Reza Sadjadi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas distribution system having fast gas switching capabilities
Patent number
7,708,859
Issue date
May 4, 2010
Lam Research Corporation
Zhisong Huang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
FAST GAS SWITCHING PLASMA PROCESSING APPARATUS
Publication number
20110281435
Publication date
Nov 17, 2011
LAM RESEARCH CORPORATION
S. M. Reza Sadjadi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS DISTRIBUTION SYSTEM HAVING FAST GAS SWITCHING CAPABILITIES
Publication number
20100159707
Publication date
Jun 24, 2010
LAM RESEARCH CORPORATION
Zhisong Huang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Fast gas switching plasma processing apparatus
Publication number
20070066038
Publication date
Mar 22, 2007
Lam Research Corporation
S.M. Reza Sadjadi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Gas distribution system having fast gas switching capabilities
Publication number
20050241763
Publication date
Nov 3, 2005
Zhisong Huang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...