Jose Vicente Siles Perez

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Pasadena, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Multi-step deep reactive ion etching fabrication process for silico...
- Patent number 9,461,352
- Issue date Oct 4, 2016
- California Institute of Technology
- Cecile Jung-Kubiak
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MULTI-STEP DEEP REACTIVE ION ETCHING FABRICATION PROCESS FOR SILICO...
- Publication number 20140340178
- Publication date Nov 20, 2014
- California Institute of Technology
- Cecile Jung-Kubiak
- H01 - BASIC ELECTRIC ELEMENTS