Josef Distl

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Oberkochen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Process for connecting an optical element of a microlithographic pr...
- Patent number 7,551,375
- Issue date Jun 23, 2009
- Carl Zeiss SMT AG
- Johannes Rau
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Optical beam guidance system and method for preventing contaminatio...
- Patent number 6,824,277
- Issue date Nov 30, 2004
- Carl Zeiss SMT AG
- Ansgar Freitag
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
Process for connecting an optical element of a microlithographic pr...
- Publication number 20060243779
- Publication date Nov 2, 2006
- Johannes Rau
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
Optical beam guidance system and method for preventing contaminatio...
- Publication number 20020145808
- Publication date Oct 10, 2002
- CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
- Ansgar Freitag
- G02 - OPTICS