Josef Rapp

Follow

Person

Opfingen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Imaging optical unit for EUV projection lithography
- Patent number 10,191,386
- Issue date Jan 29, 2019
- Carl Zeiss SMT GmbH
- Johannes Ruoff
- G02 - OPTICS
Information Patent Grant
Imaging optical unit for EUV projection lithography
- Patent number 9,835,953
- Issue date Dec 5, 2017
- Carl Zeiss SMT GmbH
- Johannes Ruoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging optical unit for EUV projection lithography
- Patent number 9,625,827
- Issue date Apr 18, 2017
- Carl Zeiss SMT GmbH
- Johannes Ruoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
IMAGING OPTICAL UNIT FOR EUV PROJECTION LITHOGRAPHY
- Publication number 20180164690
- Publication date Jun 14, 2018
- Carl Zeiss SMT GMBH
- Johannes Ruoff
- G02 - OPTICS
Information Patent Application
IMAGING OPTICAL UNIT FOR EUV PROJECTION LITHOGRAPHY
- Publication number 20170307982
- Publication date Oct 26, 2017
- Carl Zeiss SMT GMBH
- Johannes Ruoff
- G02 - OPTICS
Information Patent Application
IMAGING OPTICAL UNIT FOR EUV PROJECTION LITHOGRAPHY
- Publication number 20160147158
- Publication date May 26, 2016
- Carl Zeiss SMT GMBH
- Johannes Ruoff
- G02 - OPTICS