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Joseph D'Souza
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Sunnyvale, CA, US
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last 30 patents
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Patent Grant
Methods and apparatus for producing stable low k FSG film for HDP-CVD
Patent number
6,633,076
Issue date
Oct 14, 2003
Applied Materials, Inc.
Padmanabhan Krishnaraj
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Methods and apparatus for producing stable low k FSG film for HDP-CVD
Patent number
6,511,922
Issue date
Jan 28, 2003
Applied Materials, Inc.
Padmanabhan Krishnaraj
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Film removal employing a remote plasma source
Patent number
6,436,303
Issue date
Aug 20, 2002
Applied Materials, Inc.
Bok Heon Kim
C30 - CRYSTAL GROWTH
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last 30 patents
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Patent Application
Methods and apparatus for producing stable low k FSG film for HDP-CVD
Publication number
20030064556
Publication date
Apr 3, 2003
Applied Materials, Inc.
Padmanabhan Krishnaraj
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Methods and apparatus for producing stable low k FSG film for HDP-CVD
Publication number
20020173167
Publication date
Nov 21, 2002
APPLIED MATERIALS, INC.
Padmanabhan Krishnaraj
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...